Characterization of a Variation on AFIT’s Tunable MEMS Cantilever Array Metamaterial

2011 ◽  
pp. 111-118
Author(s):  
Matthew E. Jussaume ◽  
Peter J. Collins ◽  
Ronald A. Coutu
Keyword(s):  
Cantilever Array

Fabrication of Acoustic Emission Sensor Integrated with Cantilever Array for Detection of Signals Divided into Frequency Domain

2012 ◽  
Vol 523-524 ◽  
pp. 575-580 ◽  
Author(s):  
Takahiro Kawashima ◽  
Atsushi Matsui ◽  
Kazuo Muto ◽  
Moeto Nagai ◽  
Takayuki Shibata
Keyword(s):  
Acoustic Emission ◽  
Frequency Domain ◽  
Frequency Domain Analysis ◽  
Acoustic Emission Sensor ◽  
Batch Fabrication ◽  
Ae Signal ◽  
Cantilever Array ◽  
Detection Of Signals ◽  
Ae Signals

In order to detect acoustic emission (AE) signals which are transient elastic waves generated by rapid release of strain energy derived from deformation in materials etc., general AE sensors were fabricated by using a piezoelectric film for detection of AE signals. However, these sensors required frequency domain analysis after recording AE signal. Therefore, this research has been developing an AE sensor integrated with cantilever array with different resonant frequencies for detection of AE signals divided into frequency domain by using MEMS techniques. In this paper, a design of cantilever structures was executed. Theoretical analysis and simulation using ANSYS software revealed that a resonant frequency of a cantilever was increased with decrease of its length in the range from 100 k to 1 MHz. Therefore, fabrication and frequency characterization of a cantilever array fabricated in our batch fabrication process were executed.

scholarly journals Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

Sensors ◽  
2017 ◽  
Vol 17 (6) ◽  
pp. 1191 ◽  
Author(s):  
Marjan Zakerin ◽  
Antonin Novak ◽  
Masaya Toda ◽  
Yves Emery ◽  
Filipe Natalio ◽  
...  
Keyword(s):  
Thermal Characterization ◽  
Digital Holographic Microscopy ◽  
Silicon Cantilever ◽  
Cantilever Array ◽  
Holographic Microscopy

Fabrication and characterization of MEMS cantilever array for switching applications

2016 ◽  
Vol 157 ◽  
pp. 78-82 ◽  
Author(s):  
Deepak G. Khushalani ◽  
Rajesh S. Pande ◽  
Rajendra M. Patrikar
Keyword(s):  
Cantilever Array ◽  
Fabrication And Characterization

Characterization of a two-dimensional cantilever array with through-wafer electrical interconnects

2002 ◽  
Vol 80 (4) ◽  
pp. 664-666 ◽  
Author(s):  
Eugene M. Chow ◽  
Goksen G. Yaralioglu ◽  
Calvin F. Quate ◽  
Thomas W. Kenny
Keyword(s):  
Two Dimensional ◽  
Electrical Interconnects ◽  
Cantilever Array
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