Total Reflection X-ray Fluorescence Spectroscopy: Analysis of GaAs and InGaAs

1994 ◽  
pp. 585-593
Author(s):  
Leigh Ann Files-Sesler ◽  
Don Plumton ◽  
Yung-Chung Kao ◽  
Tae S. Kim
1993 ◽  
Vol 37 ◽  
pp. 585-593
Author(s):  
Leigh Ann Filcs-Sesler ◽  
Don Plumton ◽  
Yung-Chung Kao ◽  
Tae S. Kim

AbstractThis article explores applications of total reflection x-ray fluorescence (TRXRF) to GaAs processes. The applications include determination of surface contamination and InGaAs layer thicknesses. Surface contamination can deteriorate device performance and can occur in starting substrates and in subsequent processing. We demonstrate that TRXRF is a quick, nondestructive method for identifying sulfur contamination on incoming wafers and low levels of metallic impurities from device fabrication. Variable angle TRXRF has been used to determine heterostmeture film thickness, measuring films of InGaAs on GaAs as thin as 4 nm.


2019 ◽  
Vol 180 ◽  
pp. 105201 ◽  
Author(s):  
Ignazio Allegretta ◽  
Biancamaria Ciasca ◽  
Maria D.R. Pizzigallo ◽  
Veronica M.T. Lattanzio ◽  
Roberto Terzano

Author(s):  
J. I. Bungudu ◽  
Lorrie M. Murphy

This work investigates the concentration of some trace elements in freshwater microalgae ( Chlorella vulgaris and Spirulina platensis) through total reflection x-ray fluorescence spectroscopy (TXRF). Slurry samples were prepared from 3.4 ± 0.5 to 9.8 ± 0.5 mg of freeze-dried algae biomass for direct metals analysis. Gallium was used as internal standard at concentration of 500 µg/L and the solution was mixed for 15 second using vortex. The concentrations of different metals including Magnesium (Mg), Zinc (Zn), Phosphorus (P), Sulphur (S), Copper (Cu), Potassium (K), Calcium (Ca), Manganese (Mn) and Iron (Fe) were determined in the ranged 6.8 ± 1.7 – 15709 mg/kg. A similar study investigated the total macro and micronutrient profile Chlorella vulgaris and the published data agree with current study. Statistical analysis shows that only Ba has significant difference between Chlorella vulgaris and Spirulina platensis (P = 0.05) The two investigated algal species shows a measurable concentration using TXRF of metals such as manganese, iron, copper, and zinc. TXRF shows good accuracy with ability to determine sample in small quantities (µl) In conclusion, the sensitivity of TXRF technique can also be seen in determining elements with lower atomic number such as Ca, P and K.


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