An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System

2006 IEEE International Conference on Systems, Man and Cybernetics ◽

10.1109/icsmc.2006.384646 ◽

2006 ◽

Author(s):

Huai Zhang ◽

Zhibin Jiang ◽

Chengtao Guo ◽

Huiran Liu

Keyword(s):

Real Time ◽

Object Oriented ◽

Wafer Fabrication ◽

Simulation Platform ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Extended Object ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system

International Journal of Production Research ◽

10.1080/0020754031000118099 ◽

2003 ◽

Vol 41 (16) ◽

pp. 3921-3941 ◽

Author(s):

Hyeung-Sik Min ◽

Yuehwern Yih

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Decision Points ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling ◽

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Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2003.811890 ◽

2003 ◽

Vol 16 (2) ◽

pp. 290-298 ◽

Author(s):

Yeong-Dae Kim ◽

Sang-Oh Shim ◽

Bum Choi ◽

Hark Hwang

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Simulation Based ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets

International Journal of Production Research ◽

10.1080/0020754042000264563 ◽

2005 ◽

Vol 43 (3) ◽

pp. 471-495 ◽

Author(s):

Huiran Liu ◽

Richard Y. K. Fung ◽

Zhibin Jiang

Keyword(s):

Object Oriented ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Extended Object ◽

Semiconductor Wafer Fabrication

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On-line near-real-time scheduling of semiconductor wafer fabrication

10.32657/10356/13462 ◽

2008 ◽

Author(s):

Adeline Tee Hwee Ang

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling ◽

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Performance modeling, real-time dispatching and simulation of wafer fabrication systems using timed extended object-oriented Petri nets

Computers & Industrial Engineering ◽

10.1016/j.cie.2008.04.006 ◽

2009 ◽

Vol 56 (1) ◽

pp. 121-137 ◽

Author(s):

Huiran Liu ◽

Zhibin Jiang ◽

Richard Y.K. Fung

Keyword(s):

Real Time ◽

Performance Modeling ◽

Object Oriented ◽

Wafer Fabrication ◽

Extended Object

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Thermal-aware Real-time Scheduling Using Timed Continuous Petri Nets

ACM Transactions on Embedded Computing Systems ◽

10.1145/3322643 ◽

2019 ◽

Vol 18 (4) ◽

pp. 1-24 ◽

Author(s):

G. Desirena-López ◽

A. Ramírez-Treviño ◽

J. L. Briz ◽

C. R. Vázquez ◽

D. Gómez-Gutiérrez

Keyword(s):

Real Time ◽

Real Time Scheduling ◽

Time Scheduling ◽

Continuous Petri Nets

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Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets

Journal of Central South University of Technology ◽

10.1007/s11771-007-0077-1 ◽

2007 ◽

Vol 14 (3) ◽

pp. 393-398 ◽

Author(s):

Bing-hai Zhou ◽

Qing-zhi Pan ◽

Shi-jin Wang ◽

Bin Wu

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Hybrid Petri Nets ◽

Semiconductor Wafer Fabrication ◽

Photolithography Process

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Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Real-time scheduling of wafer fabrication with multiple product types

IEEE SMC'99 Conference Proceedings. 1999 IEEE International Conference on Systems, Man, and Cybernetics (Cat. No.99CH37028) ◽

10.1109/icsmc.1999.814200 ◽

2003 ◽

Author(s):

Hyun Joong Yoon ◽

Doo Yong Lee

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Real Time Scheduling ◽

Time Scheduling ◽

Multiple Product

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A decision support system of real time dispatching in semiconductor wafer fabrication with shortest process time in wet bench

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243287 ◽

2004 ◽

Author(s):

M.D. Hsieh ◽

Amos Lin ◽

Kenley Kuo ◽

H.L. Wang

Keyword(s):

Decision Support ◽

Decision Support System ◽

Real Time ◽

Support System ◽

Wafer Fabrication ◽

Process Time ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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