Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2003.811890 ◽

2003 ◽

Vol 16 (2) ◽

pp. 290-298 ◽

Author(s):

Yeong-Dae Kim ◽

Sang-Oh Shim ◽

Bum Choi ◽

Hark Hwang

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Simulation Based ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System

2006 IEEE International Conference on Systems, Man and Cybernetics ◽

10.1109/icsmc.2006.384646 ◽

2006 ◽

Author(s):

Huai Zhang ◽

Zhibin Jiang ◽

Chengtao Guo ◽

Huiran Liu

Keyword(s):

Real Time ◽

Object Oriented ◽

Wafer Fabrication ◽

Simulation Platform ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Extended Object ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system

International Journal of Production Research ◽

10.1080/0020754031000118099 ◽

2003 ◽

Vol 41 (16) ◽

pp. 3921-3941 ◽

Author(s):

Hyeung-Sik Min ◽

Yuehwern Yih

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Decision Points ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling ◽

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On-line near-real-time scheduling of semiconductor wafer fabrication

10.32657/10356/13462 ◽

2008 ◽

Author(s):

Adeline Tee Hwee Ang

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling ◽

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Optimization of cycle time and utilization in semiconductor test manufacturing using simulation based, on-line, near-real-time scheduling system

WSC'99. 1999 Winter Simulation Conference Proceedings. 'Simulation - A Bridge to the Future' (Cat. No.99CH37038) ◽

10.1109/wsc.1999.823204 ◽

2003 ◽

Author(s):

A.I. Sivakumar

Keyword(s):

Real Time ◽

Scheduling System ◽

Real Time Scheduling ◽

Semiconductor Test ◽

Simulation Based ◽

Time Scheduling ◽

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Simulation-based performance assessment of production planning formulations for semiconductor wafer fabrication

2015 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2015.7408392 ◽

2015 ◽

Author(s):

Timm Ziarnetzky ◽

N. Baris Kacar ◽

Lars Monch ◽

Reha Uzsoy

Keyword(s):

Performance Assessment ◽

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Based ◽

Semiconductor Wafer Fabrication

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Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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SIMULATION-BASED STOCHASTIC PROGRAMMING TO GUIDE REAL-TIME SCHEDULING FOR SMART POWER GRIDS UNDER CYBER ATTACKS

2018 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2018.8632289 ◽

2018 ◽

Author(s):

Yuan Yi ◽

Wei Xie ◽

Zhi Zhou

Keyword(s):

Stochastic Programming ◽

Real Time ◽

Cyber Attacks ◽

Power Grids ◽

Smart Power ◽

Real Time Scheduling ◽

Smart Power Grids ◽

Simulation Based ◽

Time Scheduling

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Simulation based correlation analysis on performance issues of semiconductor wafer fabrication facilities

The 26th Chinese Control and Decision Conference (2014 CCDC) ◽

10.1109/ccdc.2014.6852884 ◽

2014 ◽

Author(s):

Xingwei Pan ◽

Li Li ◽

Zhongbo Chen ◽

Pengde Jia

Keyword(s):

Correlation Analysis ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Based ◽

Semiconductor Wafer Fabrication ◽

Performance Issues

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2108 Simulation based real-time scheduling for Holonic Manufacturing Systems

The Proceedings of Manufacturing Systems Division Conference ◽

10.1299/jsmemsd.2006.33 ◽

2006 ◽

Vol 2006 (0) ◽

pp. 33-34

Author(s):

Atsushi NAKANO ◽

Koji IWAMURA ◽

Yoshitaka TANIMIZU ◽

Nobuhiro SUGIMURA

Keyword(s):

Real Time ◽

Manufacturing Systems ◽

Real Time Scheduling ◽

Simulation Based ◽

Time Scheduling ◽

Holonic Manufacturing Systems ◽

Holonic Manufacturing

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Real-time scheduling of wafer fabrication with multiple product types

IEEE SMC'99 Conference Proceedings. 1999 IEEE International Conference on Systems, Man, and Cybernetics (Cat. No.99CH37028) ◽

10.1109/icsmc.1999.814200 ◽

2003 ◽

Author(s):

Hyun Joong Yoon ◽

Doo Yong Lee

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Real Time Scheduling ◽

Time Scheduling ◽

Multiple Product

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