Electrode Modeling for Titanium Nitride, Iridium and Iridium Oxide Microelectrodes

2014 ◽  
pp. 71-79
Author(s):  
Naser Pour Aryan ◽  
Hans Kaim ◽  
Albrecht Rothermel
Keyword(s):  
Titanium Nitride ◽  
Iridium Oxide

Evolution of the microstructure of Cu(Ti)/SiO2 layers annealed in NH3

1995 ◽  
Vol 53 ◽  
pp. 452-453
Author(s):  
J. Liu ◽  
N. D. Theodore ◽  
D. Adams ◽  
S. Russell ◽  
T. L. Alford ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Titanium Nitride ◽  
Large Scale ◽  
Standard Procedure ◽  
Alloy Film ◽  
Electron Beam Evaporation ◽  
Copper Metallization ◽  
Nominal Composition ◽  
Ti Alloy ◽  
Thermally Grown

Copper-based metallization has recently attracted extensive research because of its potential application in ultra-large-scale integration (ULSI) of semiconductor devices. The feasibility of copper metallization is, however, limited due to its thermal stability issues. In order to utilize copper in metallization systems diffusion barriers such as titanium nitride and other refractory materials, have been employed to enhance the thermal stability of copper. Titanium nitride layers can be formed by annealing Cu(Ti) alloy film evaporated on thermally grown SiO2 substrates in an ammonia ambient. We report here the microstructural evolution of Cu(Ti)/SiO2 layers during annealing in NH3 flowing ambient.The Cu(Ti) films used in this experiment were prepared by electron beam evaporation onto thermally grown SiO2 substrates. The nominal composition of the Cu(Ti) alloy was Cu73Ti27. Thermal treatments were conducted in NH3 flowing ambient for 30 minutes at temperatures ranging from 450°C to 650°C. Cross-section TEM specimens were prepared by the standard procedure.

GLANCING INCIDENCE X-RAY STUDIES OF TITANIUM NITRIDE THIN FILMS USING A NEW MULTIPURPOSE LABORATORY SPECTROMETER

1989 ◽  
Vol 50 (C7) ◽  
pp. C7-169-C7-173
Author(s):  
R.C BUSCHERT ◽  
P. N. GIBSON ◽  
W. GISSLER ◽  
J. HAUPT ◽  
T. A. CRABB
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
X Ray

Tribotechnical Characteristics of Titanium Nitride Coating for Heavy-Duty Friction Clutches.

1980 ◽  
Vol 41 (5) ◽  
pp. 558-566
Author(s):  
O. Yu Elagina ◽  
◽  
D.O. Kolbas ◽  
A.G. Buklakov ◽  
N. Derr ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Nitride Coating ◽  
Heavy Duty ◽  
Titanium Nitride Coating ◽  
Tribotechnical Characteristics

Stoichiometric composition of thin-film surface structures and its influence on the functional characteristics as regards gyroscopic devices

2020 ◽  
pp. 78-90
Author(s):  
M. A. Tit ◽  
S. N. Belyaev
Keyword(s):  
Thin Film ◽  
Titanium Nitride ◽  
Niobium Carbide ◽  
Structural Phase ◽  
Stoichiometric Composition ◽  
Film Surface ◽  
Surface Structures ◽  
Functional Surface ◽  
Base Surface ◽  
Thin Film Surface

This article considers the research results of the effect of stoichiometry on the properties of titanium nitride thin-film coatings of the float and electrostatic gyroscopes. It presents the results of tests of such mechanical and optical characteristics of titanium nitride thin-film structures as microhardness, resistance to wear and friction, and image contrast determined by the reflection coefficients of a titanium nitride base surface and a raster pattern formed by local laser oxidation. When making a rotor of a cryogenic gyroscope, the prospects of use and technological methods for the formation of functional surface structures of niobium carbide and nitride are considered. It is shown that during the formation of coatings of the required composition, the most important is the thermodynamic estimation of possible interactions. These interactions allow us to accomplish the structural-phase modification of the material, which is determined by the complex of possible topochemical reactions leading to the formation of compounds, including non-stoichiometric composition.

scholarly journals Impact of Iridium Oxide Electrodes on the Ferroelectric Phase of Thin Hf 0.5 Zr 0.5 O 2 Films

2021 ◽  
pp. 2100012
Author(s):  
Terence Mittmann ◽  
Thomas Szyjka ◽  
Hsain Alex ◽  
Marian Cosmin Istrate ◽  
Patrick D. Lomenzo ◽  
...  
Keyword(s):  
Ferroelectric Phase ◽  
Iridium Oxide ◽  
Oxide Electrodes

scholarly journals Increased Ir–Ir Interaction in Iridium Oxide during the Oxygen Evolution Reaction at High Potentials Probed by Operando Spectroscopy

ACS Catalysis ◽  
2021 ◽  
pp. 10043-10057
Author(s):  
Steffen Czioska ◽  
Alexey Boubnov ◽  
Daniel Escalera-López ◽  
Janis Geppert ◽  
Alexandra Zagalskaya ◽  
...  
Keyword(s):  
Oxygen Evolution ◽  
Oxygen Evolution Reaction ◽  
Iridium Oxide ◽  
Operando Spectroscopy ◽  
High Potentials

scholarly journals Titanium Nitride Nanodonuts Synthesized from Natural Ilmenite Ore as a Novel and Efficient Thermoplasmonic Material

Nanomaterials ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 76
Author(s):  
Thanh-Lieu Thi Le ◽  
Lam Tan Nguyen ◽  
Hoai-Hue Nguyen ◽  
Nguyen Van Nghia ◽  
Nguyen Minh Vuong ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Low Cost ◽  
Visible Region ◽  
Resonance Absorption ◽  
Solar Light ◽  
Localized Surface Plasmon ◽  
Water Evaporation ◽  
Energy Applications ◽  
Simulated Solar Light ◽  
New Class

Nanostructures of titanium nitride (TiN) have recently been considered as a new class of plasmonic materials that have been utilized in many solar energy applications. This work presents the synthesis of a novel nanostructure of TiN that has a nanodonut shape from natural ilmenite ore using a low-cost and bulk method. The TiN nanodonuts exhibit strong and spectrally broad localized surface plasmon resonance absorption in the visible region centered at 560 nm, which is well suited for thermoplasmonic applications as a nanoscale heat source. The heat generation is investigated by water evaporation experiments under simulated solar light, demonstrating excellent solar light harvesting performance of the nanodonut structure.

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