Evolution of the microstructure of Cu(Ti)/SiO2 layers annealed in NH3

1995 ◽  
Vol 53 ◽  
pp. 452-453
Author(s):  
J. Liu ◽  
N. D. Theodore ◽  
D. Adams ◽  
S. Russell ◽  
T. L. Alford ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Titanium Nitride ◽  
Large Scale ◽  
Standard Procedure ◽  
Alloy Film ◽  
Electron Beam Evaporation ◽  
Copper Metallization ◽  
Nominal Composition ◽  
Ti Alloy ◽  
Thermally Grown

Copper-based metallization has recently attracted extensive research because of its potential application in ultra-large-scale integration (ULSI) of semiconductor devices. The feasibility of copper metallization is, however, limited due to its thermal stability issues. In order to utilize copper in metallization systems diffusion barriers such as titanium nitride and other refractory materials, have been employed to enhance the thermal stability of copper. Titanium nitride layers can be formed by annealing Cu(Ti) alloy film evaporated on thermally grown SiO2 substrates in an ammonia ambient. We report here the microstructural evolution of Cu(Ti)/SiO2 layers during annealing in NH3 flowing ambient.The Cu(Ti) films used in this experiment were prepared by electron beam evaporation onto thermally grown SiO2 substrates. The nominal composition of the Cu(Ti) alloy was Cu73Ti27. Thermal treatments were conducted in NH3 flowing ambient for 30 minutes at temperatures ranging from 450°C to 650°C. Cross-section TEM specimens were prepared by the standard procedure.

scholarly journals Effects of Ag contents on the microstructure and SERS performance of self-grown Ag nanoparticles/Mo–Ag alloy films

2020 ◽  
Vol 9 (1) ◽  
pp. 751-759 ◽  
Author(s):  
Xinxin Lian ◽  
Yuanjiang Lv ◽  
Haoliang Sun ◽  
David Hui ◽  
Guangxin Wang
Keyword(s):  
Ag Nanoparticles ◽  
Large Scale ◽  
Low Cost ◽  
Film Surface ◽  
Time Domain Analysis ◽  
Alloy Film ◽  
Scale Production ◽  
Alloy Films ◽  
Surface Enhanced Raman ◽  
Ag Film

AbstractAg nanoparticles/Mo–Ag alloy films with different Ag contents were prepared on polyimide by magnetron sputtering. The effects of Ag contents on the microstructure of self-grown Ag nanoparticles/Mo–Ag alloy films were investigated using XRD, FESEM, EDS and TEM. The Ag content plays an important role in the size and number of uniformly distributed Ag nanoparticles spontaneously formed on the Mo–Ag alloy film surface, and the morphology of the self-grown Ag nanoparticles has changed significantly. Additionally, it is worth noting that the Ag nanoparticles/Mo–Ag alloy films covered by a thin Ag film exhibits highly sensitive surface-enhanced Raman scattering (SERS) performance. The electric field distributions were calculated using finite-difference time-domain analysis to further prove that the SERS enhancement of the films is mainly determined by “hot spots” in the interparticle gap between Ag nanoparticles. The detection limit of the Ag film/Ag nanoparticles/Mo–Ag alloy film for Rhodamine 6G probe molecules was 5 × 10−14 mol/L. Therefore, the novel type of the Ag film/Ag nanoparticles/Mo–Ag alloy film can be used as an ideal SERS-active substrate for low-cost and large-scale production.

Interfacial Reactions of Sn-3.0Ag-0.5Cu Solder with Sputter Cu-Ti Alloy Film UBM

2021 ◽  
Author(s):  
Yupeng Wang ◽  
Haibin Liu ◽  
Mingdong Bao ◽  
Wenhao Yang ◽  
Bing Zhou ◽  
...  
Keyword(s):  
Alloy Film ◽  
Interfacial Reactions ◽  
Ti Alloy

Comparison of Sputtered Titanium Nitride on Silicon Dioxide and Aluminum-Alloy Thin Films

1997 ◽  
Vol 3 (S2) ◽  
pp. 469-470
Author(s):  
J.L. Drown ◽  
S.M. Merchant ◽  
M.E. Gross ◽  
D. Eaglesham ◽  
L.A. Giannuzzi ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Titanium Nitride ◽  
Physical Vapor Deposition ◽  
Semiconductor Industry ◽  
Microstructural Characterization ◽  
Growth Conditions ◽  
Alloy Film ◽  
Al Alloy ◽  
Orientation Relationships ◽  
Materials Used

Titanium nitride (TiN) films are used as anti-reflection coatings (ARC) on aluminum (Al) films to facilitate lithography processes during multilevel metallization for the manufacture of integrated circuits on silicon-based (Si) semiconductor devices. It is generally accepted in the literature that the microstructure of multilevel metal stacks is influenced by the texture of the substrate. For the case of interconnect materials used in the semiconductor industry, a typical metal stack is as follows: Titanium/Titanium Nitride/Al-alloy/ARC-Titanium Nitride. The Ti/TiN layer underneath the Al-alloy film is used as a barrier stack to prevent junction spiking. The Ti/TiN underlayer also determines the growth conditions (crystallography and orientation relationships) of the subsequent Al-alloy film.This study focuses on the microstructural characterization of the ARC-TiN layer on Si-oxide and Ti/TiN/Al-alloy substrates that are fabricated under similar conditions using conventional physical vapor deposition (PVD - sputtering) techniques. The ARC-TiN microstructure was investigated by transmission electron microscopy (TEM) using a Philips EM430 operating at 300 kV.

scholarly journals Preparation of Ion-Exchanged TEMPO-Oxidized Celluloses as Flame Retardant Products

Molecules ◽  
2019 ◽  
Vol 24 (10) ◽  
pp. 1947
Author(s):  
Cunzhen Geng ◽  
Zhihui Zhao ◽  
Zhixin Xue ◽  
Peilong Xu ◽  
Yanzhi Xia
Keyword(s):  
Thermal Stability ◽  
Ion Exchange ◽  
Heat Release ◽  
Textile Industry ◽  
Large Scale ◽  
13C Nmr Spectroscopy ◽  
Commercial Application ◽  
Limiting Oxygen Index ◽  
13C Nuclear Magnetic Resonance ◽  
Microscale Combustion Calorimetry

Cellulose, as one of the most abundant natural biopolymers, has been widely used in textile industry. However, owing to its drawbacks of flammability and ignitability, the large-scale commercial application of neat cellulose is limited. This study investigated some TEMPO-oxidized cellulose (TOC) which was prepared by selective TEMPO-mediated oxidation and ion exchange. The prepared TOC was characterized by Fourier transform infrared (FT-IR) spectroscopy and solid-state 13C-nuclear magnetic resonance (13C-NMR) spectroscopy. The thermal stability and combustion performance of TOC were investigated by thermogravimetry analysis (TG), microscale combustion calorimetry (MCC) and limiting oxygen index (LOI). The results demonstrated that the thermal stability of TOC was less than that of the pristine material cellulose, but the peak of heat release rate (pHHR) and the total heat release (THR) of all TOC were significantly reduced. Additionally, the LOI values of all TOC products were much higher 25%. In summary, the above results indicated that the modified cellulose with carboxyl groups and metal ions by selective oxidation and ion exchange endows efficient flame retardancy.

Synthesis of nanocrystalline titanium nitride at low temperature and its thermal stability

2009 ◽  
Vol 476 (1-2) ◽  
pp. 603-605 ◽  
Author(s):  
Jianhua Ma ◽  
Meining Wu ◽  
Yihong Du ◽  
Suqin Chen ◽  
Guoxing Li ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Low Temperature ◽  
Titanium Nitride ◽  
Nanocrystalline Titanium

scholarly journals Novel Chaperones RrGroEL and RrGroES for Activity and Stability Enhancement of Nitrilase in Escherichia coli and Rhodococcus ruber

Molecules ◽  
2020 ◽  
Vol 25 (4) ◽  
pp. 1002 ◽  
Author(s):  
Chunmeng Xu ◽  
Lingjun Tang ◽  
Youxiang Liang ◽  
Song Jiao ◽  
Huimin Yu ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Large Scale ◽  
Nitrile Hydratase ◽  
Fusion Expression ◽  
Solvent Tolerance ◽  
Rhodococcus Ruber ◽  
Bacterial Cells ◽  
E Coli ◽  
Nitrilase Activity ◽  
Stability Enhancement

For large-scale bioproduction, thermal stability is a crucial property for most industrial enzymes. A new method to improve both the thermal stability and activity of enzymes is of great significance. In this work, the novel chaperones RrGroEL and RrGroES from Rhodococcus ruber, a nontypical actinomycete with high organic solvent tolerance, were evaluated and applied for thermal stability and activity enhancement of a model enzyme, nitrilase. Two expression strategies, namely, fusion expression and co-expression, were compared in two different hosts, E. coli and R. ruber. In the E. coli host, fusion expression of nitrilase with either RrGroES or RrGroEL significantly enhanced nitrilase thermal stability (4.8-fold and 10.6-fold, respectively) but at the expense of enzyme activity (32–47% reduction). The co-expression strategy was applied in R. ruber via either a plasmid-only or genome-plus-plasmid method. Through integration of the nitrilase gene into the R. ruber genome at the site of nitrile hydratase (NHase) gene via CRISPR/Cas9 technology and overexpression of RrGroES or RrGroEL with a plasmid, the engineered strains R. ruber TH3 dNHase::RrNit (pNV18.1-Pami-RrNit-Pami-RrGroES) and TH3 dNHase::RrNit (pNV18.1-Pami-RrNit-Pami-RrGroEL) were constructed and showed remarkably enhanced nitrilase activity and thermal stability. In particular, the RrGroEL and nitrilase co-expressing mutant showed the best performance, with nitrilase activity and thermal stability 1.3- and 8.4-fold greater than that of the control TH3 (pNV18.1-Pami-RrNit), respectively. These findings are of great value for production of diverse chemicals using free bacterial cells as biocatalysts.

Thermal stability and compatibility of ammonium nitrate explosives on a small and large scale

1992 ◽  
Vol 212 ◽  
pp. 77-85 ◽  
Author(s):  
Jimmie C. Oxiey ◽  
Surender M. Kaushik ◽  
Nancy S. Gilson
Keyword(s):  
Thermal Stability ◽  
Ammonium Nitrate ◽  
Large Scale

Synthesis and Thermal Stability of HfO2 Nanoparticles

2010 ◽  
Vol 1256 ◽  
Author(s):  
Girija Shankar Chaubey ◽  
Yuan Yao ◽  
Julien Pierre Amelie Makongo Mangan ◽  
Pranati Sahoo ◽  
Pierre F. P. Poudeu ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Specific Surface ◽  
Surface Area ◽  
Specific Surface Area ◽  
Large Scale ◽  
Average Diameter ◽  
Scale Production ◽  
Simple Method ◽  
Good Thermal Stability ◽  
Large Scale Production

AbstractA simple method is reported for the synthesis of monodispersed HfO2 nanoparticles by the ammonia catalyzed hydrolysis and condensation of hafnium (IV) tert-butoxide in the presence of surfactants at room temperature. Transmission electron microscopy shows faceted nanoparticles with an average diameter of 3-4 nm. As-synthesized nanoparticles are amorphous in nature and crystallize upon moderate heat treatment. The HfO2 nanoparticles have a narrow size distribution, large specific surface area and good thermal stability. Specific surface area was about 239 m2/g on as-prepared nanoparticle samples while those annealed at 500 °C have specific surface area of 221 m2/g indicating that there was no significant increase in particle size. This result was further confirmed by TEM images of nanoparticles annealed at 300 °C and 500 °C. X-ray diffraction studies of the crystallized nanoparticles revealed that HfO2 nanoparticles were monoclinic in structure. The synthetic procedure used in this work can be readily modified for large scale production of monodispersed HfO2 nanoparticles.

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