Study on the Fabrication Process of a MEMS Bistable Energy Harvester Based on Coupled Component Structures
2016 ◽
Vol 176
(1)
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pp. 73-84
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Keyword(s):
2019 ◽
Vol 8
(2S3)
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pp. 1023-1027
2020 ◽
Vol 26
(8)
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pp. 2479-2486
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Keyword(s):
2018 ◽
Vol 44
(2)
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pp. 721-730
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