Miniaturized Accelerometers Based on Silicon Micromachining Techniques
Keyword(s):
2020 ◽
Vol 68
(11)
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pp. 7676-7681
Keyword(s):
Keyword(s):
2015 ◽
pp. 3000-3010
Keyword(s):
1988 ◽
Vol 3
(5)
◽
pp. 931-942
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Keyword(s):
1991 ◽
Vol 15
(1-4)
◽
pp. 399-406
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