Au-Ni Contacts on β-SiC Films

1989 ◽  
pp. 179-179 ◽  
Author(s):  
V. H. Watt ◽  
K. H. Jackson
Keyword(s):  
Sic Films

Deposition and properties of polycrystalline -SiC films using LPCVD with different dopant amount

2006 ◽  
Vol 42 (13) ◽  
pp. 775 ◽  
Author(s):  
S. Noh ◽  
X. Fu ◽  
L. Chen ◽  
M. Mehregany
Keyword(s):  
Sic Films

Initial study on the structure and photoluminescence properties of SiC films doped with Al

2006 ◽  
Vol 252 (12) ◽  
pp. 4340-4344 ◽  
Author(s):  
Z.D. Sha ◽  
X.M. Wu ◽  
L.J. Zhuge
Keyword(s):  
Initial Study ◽  
Photoluminescence Properties ◽  
Sic Films

Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition

2016 ◽  
Vol 182 ◽  
pp. 81-84 ◽  
Author(s):  
Bin Li ◽  
Qi Li ◽  
Hirokazu Katsui ◽  
Takashi Goto ◽  
Rong Tu
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Vacuum Degree ◽  
Sic Films

A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD

2007 ◽  
Vol 136 (2) ◽  
pp. 613-617 ◽  
Author(s):  
Sangsoo Noh ◽  
Xiaoan Fu ◽  
Li Chen ◽  
Mehran Mehregany
Keyword(s):  
Electrical Properties ◽  
Nitrogen Doped ◽  
Sic Films

Fracture of Polycrystalline 3C-SiC Films in Microelectromechanical Systems

2004 ◽  
Vol 13 (6) ◽  
pp. 972-976 ◽  
Author(s):  
D. Gao ◽  
C. Carraro ◽  
V. Radmilovic ◽  
R.T. Howe ◽  
R. Maboudian
Keyword(s):  
Microelectromechanical Systems ◽  
Sic Films

Brillouin scattering study on the wave properties in thin SiC films

Ultrasonics ◽  
2004 ◽  
Vol 42 (1-9) ◽  
pp. 391-394
Author(s):  
Mami Matsukawa ◽  
Satoshi Murata ◽  
Takashi Matsumoto ◽  
Takaomi Matsutani ◽  
Masato Kiuchi
Keyword(s):  
Brillouin Scattering ◽  
Scattering Study ◽  
Wave Properties ◽  
Sic Films

Friction and Wear Properties of Magnetron Sputtered DLC/SiC Films on Magnesium Alloy

2009 ◽  
Vol 610-613 ◽  
pp. 853-858 ◽  
Author(s):  
Xiao Jing Xu ◽  
Deng Fu Xia
Keyword(s):  
Friction And Wear ◽  
High Hardness ◽  
High Wear Resistance ◽  
Modulus Ratio ◽  
Wear Properties ◽  
Silicon Carbon ◽  
Alloy Az91d ◽  
The Mean ◽  
Friction And Wear Properties ◽  
Sic Films

The nano-indentation response and the friction/wear properties of DLC/SiC (diamond-like carbon/silicon carbon) double layer thin films deposited on Mg alloy (AZ91D) substrate using magnetron sputtering technique at room temperature were investigated. The results show that the DLC films displayed low nano-hardness (3.05 GPa), low Young's modulus (24.67 GPa) but high hardness-to-modulus ratio (0.124). The films-substrate system exhibited a good friction and wear properties with the mean friction coefficient of about 0.175, the special wear rate in the magnitude order of 10−6 mm3 m−1 N−1 together with little film-cracking and interface-delaminating, when sliding against Si3N4 (silicon nitride) ball using ball-on-disc wear tester under dry frictional condition. The high wear-resistance is in accordance with high ductility of the films, good modulus match in the films-substrate system, and high hardness-to-modulus ratio of the films. The underlying factors are discussed and are believed to be due to the substrate is Mg, a metal with high activity.

Sign in / Sign up

Export Citation Format

Share Document