Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics
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9783642934087, 9783642934063

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Growth of β-SiC Heteroepitaxial Films on Vicinal (001) Si Substrates

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_4 ◽

1989 ◽

pp. 40-44 ◽

Author(s):

L. G. Matus ◽

J. A. Powell

Keyword(s):

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Reactive Ion Etching for SiC Device Fabrication

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_29 ◽

1989 ◽

pp. 192-198 ◽

Author(s):

W.-S. Pan ◽

A. J. Steckl

Keyword(s):

Reactive Ion Etching ◽

Device Fabrication ◽

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Au-Ni Contacts on β-SiC Films

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_26 ◽

1989 ◽

pp. 179-179 ◽

Author(s):

V. H. Watt ◽

K. H. Jackson

Keyword(s):

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Fabrication of a-Si:H/a-SiC:H Multilayers by a Glow Discharge Method and Carrier Transport Properties

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_9 ◽

1989 ◽

pp. 66-76

Author(s):

H. Matsunami ◽

M. Yoshimoto ◽

T. Fuyuki

Keyword(s):

Glow Discharge ◽

Transport Properties ◽

Carrier Transport ◽

Discharge Method ◽

Carrier Transport Properties

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Present and Future Applications of Amorphous Silicon Carbide

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_8 ◽

1989 ◽

pp. 58-65 ◽

Author(s):

S. Furukawa

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Amorphous Silicon Carbide

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Epitaxial Growth of 3C-SiC on a Si Substrate Using Methyltrichlorosilane

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_5 ◽

1989 ◽

pp. 45-50 ◽

Author(s):

S. Nishino ◽

J. Saraie

Keyword(s):

Epitaxial Growth ◽

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Preparation and Properties of Polycrystalline Silicon Carbide Films Produced by Plasma Enhanced Chemical Vapor Deposition, and Their Applications

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_21 ◽

1989 ◽

pp. 142-147 ◽

Author(s):

Y. Onuma ◽

F. Nagaune ◽

K. Kamimura

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Polycrystalline Silicon Carbide

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Amorphous Silicon Carbide Thin Films Produced in the Glow Discharge Deposition System

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_20 ◽

1989 ◽

pp. 134-141 ◽

Author(s):

N. T. Tran

Keyword(s):

Silicon Carbide ◽

Glow Discharge ◽

Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Glow Discharge Deposition

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The Measurement of Stress in Silicon Carbide Using the Photoelastic Effect

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_18 ◽

1989 ◽

pp. 129-132

Author(s):

K. H. Jackson ◽

P. Zhou ◽

E. Jones ◽

G. L. Harris ◽

M. G. Spencer

Keyword(s):

Silicon Carbide ◽

Photoelastic Effect

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Gamma-Ray Irradiation Effects on 3C-SiC Devices

Amorphous and Crystalline Silicon Carbide and Related Materials - Springer Proceedings in Physics ◽

10.1007/978-3-642-93406-3_17 ◽

1989 ◽

pp. 123-128 ◽

Author(s):

I. Nashiyama ◽

M. Shinohara ◽

T. Matsumoto ◽

K. Endo ◽

E. Sakuma ◽

...

Keyword(s):

Gamma Ray ◽

Irradiation Effects ◽

Gamma Ray Irradiation

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