Surface Profilometry
Keyword(s):
AbstractAs outlined in the previous chapter, existing technologies for surface profilometry show certain drawbacks in terms of resolution, dynamic measurement range, three-dimensional measurement capabilities and speed. The following chapter introduces a novel approach to surface profilometry which aims to provide solutions to the problems named. The basic setup for all experiments is centered around a two-beam interferometer of the Michelson type.
2013 ◽
Vol 333-335
◽
pp. 32-36
2018 ◽
Vol 74
(2)
◽
pp. II_110-II_117
2005 ◽
Vol 44
(6B)
◽
pp. 4325-4329
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