YBaCuO Superconducting Thin Films Protected by Diamondlike Carbon Films Using KrF Excimer Laser Ablation

AbstractThe perovskite oxide YBa2Cu3O7-x (YBCO) and Pb(ZrxTi1-x)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600mTorr O2, 2-3J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

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Preparation of PbZrxTi1−xO3 Thin Films by KrF Excimer Laser Ablation Technique

MRS Proceedings ◽

10.1557/proc-433-237 ◽

1996 ◽

Vol 433 ◽

Cited By ~ 2

Author(s):

Hiromitsu Kurogi ◽

Yukihiko Yamagata ◽

Tomoaki Ikegami ◽

Kenji Ebihara ◽

Bok Yin Tong

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Oxygen Pressure ◽

Ferroelectric Properties ◽

Pzt Thin Films ◽

Excimer Laser Ablation ◽

Pzt Films ◽

Krf Excimer Laser ◽

Laser Ablation Technique

AbstractPb(ZrxTi1−x)O3(PZT) thin films have excellent ferroelectric, optical, piezoelectric and pyroelectric properties. We prepared PZT thin films using the excimer laser ablation technique. A pulsed KrF excimer laser was used to ablate PZT bulk targets. We have studied optimum preparation conditions such as an oxygen pressure, a laser energy fluence and a substrate temperature.In this paper, we investigated the composition, crystallization and ferroelectric properties of the PZT films prepared under various deposition conditions.The X-ray diffraction (XRD) patterns showed that the PZT films prepared on MgO(100) substrates at 600°C and with a laser fluence of 2J/cm2 had a perovskite - pyrochlore mixed structure. The condition of 100 mTorr oxygen pressure provided high quality perovskite films. It is found that the stoichiometric composition of the deposited films is obtained in ambient oxygen of 100˜400 mTorr. The ferroelectric properties of the Pt/PZT/Pt/MgO structure were studied. The capacitance-voltage characteristics and the corresponding hysteresis loop of the dielectric-electric field curve were discussed.We also studied optical emission of the PZT plasma plume to understand quantitative relation between the PZT film quality and the ablation plume plasma. We identified spectral lines originated in Pb, Pb+, Zr, Zr+, Ti, Ti+, PbO and TiO. These spectral intensities have remarkable dependence on the ambient O2 pressure.

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Tailored High-Tc Superconducting Thin Films Prepared by Layer-By-Layer Deposition with Excimer Laser

MRS Proceedings ◽

10.1557/proc-169-533 ◽

1989 ◽

Vol 169 ◽

Cited By ~ 1

Author(s):

Tomoji Kawai ◽

Masaki Kanai ◽

Hitoshi Tabata ◽

Shichio Kawai

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Weak Interaction ◽

Superconducting Thin Films ◽

Layer By Layer ◽

Deposition Method ◽

High Tc ◽

Excimer Laser Ablation ◽

Layer Deposition

AbstractBy using 1ayer-by-1ayer successive deposition method with excimer laser ablation, the distance between CuO2 planes in the Bi2Sr2Ca1Cu2Oy superconductor has been controlled and super lattices with concentration modulation of Y and Ca have been formed. From the properties of these ‘Tailored films’, it is suggested that there is an interaction between CuO2 layers across Ca layer to affect the Tc value, but there is a very weak interaction across Bi2O2 blocking layers.

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Deposition of superconducting thin films with excimer laser ablation of sintered oxide ceramics

International Conference on Optoelectronic Science and Engineering '90 ◽

10.1117/12.2294761 ◽

1990 ◽

Author(s):

Chengwu An

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Superconducting Thin Films ◽

Oxide Ceramics ◽

Excimer Laser Ablation ◽

Sintered Oxide

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Deposition of crystal polythiophene thin films by KrF excimer laser ablation

Journal of Materials Research ◽

10.1557/jmr.2000.0079 ◽

2000 ◽

Vol 15 (2) ◽

pp. 536-540 ◽

Cited By ~ 2

Author(s):

Y. F. Lu ◽

Z. M. Ren ◽

Z. H. Mai ◽

T. C. Chong ◽

S. C. Ng ◽

...

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Electronic Properties ◽

Excimer Laser ◽

Uniform Size ◽

Excimer Laser Ablation ◽

Atomic Force ◽

Structural And Electronic Properties ◽

Raman And Infrared Spectroscopy ◽

Krf Excimer Laser

Thin films of polythiophene, a kind of polyheterocyclic compound with hydrogen function groups, were deposited by KrF excimer laser ablation of a compressed solid target in a vacuum chamber. The laser pulse fluence was approximately selected at 2 J/cm2 with a pulse duration of 25 ns. The structural, topographic, and electronic properties of the deposited thin films were analyzed by atomic force microscope, x-ray diffraction, and Raman and infrared spectroscopy measurements. Deposited thin films were observed to have good crystal properties and to be composed of crystalline cubes with a uniform size of 0.1 μm. The electronic structure of the deposited thin films should be different from the target materials, resulting from the laser irradiation effects. The influence of the deposition temperature on the structural and electronic properties of the deposited thin films was studied.

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Optimization of depositing Y1Ba2Cu3O7-δ superconducting thin films by excimer laser ablation with Co2 laser-heated substrates

Physica C Superconductivity ◽

10.1016/0921-4534(92)90347-f ◽

1992 ◽

Vol 195 (3-4) ◽

pp. 241-257 ◽

Cited By ~ 22

Author(s):

K.H. Wu ◽

J.Y. Juang ◽

C.L. Lee ◽

T.C. Lai ◽

T.M. Uen ◽

...

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Co2 Laser ◽

Superconducting Thin Films ◽

Excimer Laser Ablation ◽

Laser Heated

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Studies of carbon nitride thin films synthesized by KrF excimer laser ablation of graphite in a nitrogen atmosphere

Journal of Applied Physics ◽

10.1063/1.368446 ◽

1998 ◽

Vol 84 (5) ◽

pp. 2909-2912 ◽

Cited By ~ 33

Author(s):

Y. F. Lu ◽

Z. M. Ren ◽

W. D. Song ◽

D. S. H. Chan ◽

T. S. Low ◽

...

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Carbon Nitride ◽

Nitrogen Atmosphere ◽

Excimer Laser Ablation ◽

Krf Excimer Laser

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Synthesis and Characterization of Ferroelectric Thin Films by KrF Excimer Laser Ablation for Memory Applications

MRS Proceedings ◽

10.1557/proc-526-211 ◽

1998 ◽

Vol 526 ◽

Cited By ~ 1

Author(s):

Ashok Kumar ◽

M.R. Alam

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Lead Zirconate Titanate ◽

Laser Energy ◽

Ferroelectric Thin Film ◽

Lead Zirconate ◽

Test System ◽

Excimer Laser Ablation ◽

Krf Excimer Laser

AbstractPb(ZrxTi1-x)O3 (lead zirconate titanate or PZT) ferroelectric thin film capacitors are of considerable interest for the realization of memory devices such as nonvolatile random access memories (NVRAMs). The PZT capacitors were prepared on platinized silicon Pt/(100)Si using conducting oxide LaxSr1-xCoO3 (lanthanum strontium cobalt oxide or LSCO) as electrodes. The PZT and LSCO thin films were deposited by the KrF excimer laser ablation technique. The optimum preparation conditions such as oxygen pressure, laser energy influence and substrate temperature were investigated. The PZT and LSCO films grown on Pt/(100)Si are polycrystalline. The crystallographic properties of the films were determined using X-ray diffractometer (XRD) method. The electrical characterizations of the films including hysteresis loop, fatigue, and retention properties were determined by the RT66A Standardized Ferroelectric Test System.

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