Unsupervised Learning for Wafer Surface Defect Pattern Recognition

2021 ◽  
pp. 275-285
Author(s):  
Sheng Geng ◽  
Huaping Liu ◽  
Feng Wang ◽  
Shimin Zhao ◽  
Hu Liu
2021 ◽  
Vol 2078 (1) ◽  
pp. 012046
Author(s):  
Naigong Yu ◽  
Xin Li ◽  
Qiao Xu ◽  
Kai Jiang

Abstract Wafer manufacturing is an important step in quality control and analysis in the semiconductor industry. The defect pattern classification algorithm of wafer maps has received extensive attention from academia and industry. At present, most methods for detecting wafer surface defect patterns focus on static data model classification and analysis. However, in the production process, static data models cannot satisfy the dynamic analysis of wafer defect patterns in the form of streaming data. In this regard, this paper proposes a wafer surface defect pattern detection method based on incremental learning. Our experiment uses Resnet as the backbone network, and the data set uses the WM811K wafer data set. Experiments have proved that our method can achieve better classification accuracy in the field of wafer defect detection, which provides the possibility for continuous learning of wafer defects in the future.


2009 ◽  
pp. 725-754
Author(s):  
J. Gerard Wolff

This chapter describes some of the kinds of “intelligence” that may be exhibited by an intelligent database system based on the SP theory of computing and cognition. The chapter complements an earlier paper on the SP theory as the basis for an intelligent database system (Wolff, forthcoming b) but it does not depend on a reading of that earlier paper. The chapter introduces the SP theory and its main attractions as the basis for an intelligent database system: that it uses a simple but versatile format for diverse kinds of knowledge, that it integrates and simplifies a range of AI functions, and that it supports established database models when that is required. Then with examples and discussion, the chapter illustrates aspects of “intelligence” in the system: pattern recognition and information retrieval, several forms of probabilistic reasoning, the analysis and production of natural language, and the unsupervised learning of new knowledge.


1972 ◽  
Vol 4 (4) ◽  
pp. 401-416 ◽  
Author(s):  
P.K. Rajasekaran ◽  
M.D. Srinath

Energies ◽  
2018 ◽  
Vol 11 (3) ◽  
pp. 592 ◽  
Author(s):  
Wen Si ◽  
Simeng Li ◽  
Huaishuo Xiao ◽  
Qingquan Li ◽  
Yalin Shi ◽  
...  

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