silicon wafer surface Latest Research Papers

Double-sided Silicon Wafer Surface Protection Method for Photolithography Process

10.18260/1-2-60-36258 ◽

2021 ◽

Author(s):

Rebecca Horak

Keyword(s):

Silicon Wafer ◽

Wafer Surface ◽

Surface Protection ◽

Silicon Wafer Surface ◽

Protection Method ◽

Photolithography Process

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Influence of silicon wafer surface roughness on semiconductor device characteristics

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ab918c ◽

2020 ◽

Vol 59 (SM) ◽

pp. SMMB06

Author(s):

Keiichiro Mori ◽

Shuichi Samata ◽

Noritomo Mitsugi ◽

Akinobu Teramoto ◽

Rihito Kuroda ◽

...

Keyword(s):

Surface Roughness ◽

Silicon Wafer ◽

Semiconductor Device ◽

Wafer Surface ◽

Silicon Wafer Surface

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Self-organized fractal-like structures formation on the silicon wafer surface using the femtosecond laser pulses

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2020.106008 ◽

2020 ◽

Vol 128 ◽

pp. 106008

Author(s):

R. Goodarzi ◽

F. Hajiesmaeilbaigi ◽

E. Bostandoost

Keyword(s):

Femtosecond Laser ◽

Silicon Wafer ◽

Laser Pulses ◽

Femtosecond Laser Pulses ◽

Wafer Surface ◽

Self Organized ◽

Silicon Wafer Surface

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Alumina film deposited by spin-coating method for silicon wafer surface passivation

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-019-02808-6 ◽

2020 ◽

Vol 31 (3) ◽

pp. 2686-2690 ◽

Cited By ~ 1

Author(s):

Liqi Cao ◽

Ning Yang ◽

Shizheng Li ◽

Xiaojun Ye ◽

Xiao Yuan ◽

...

Keyword(s):

Silicon Wafer ◽

Spin Coating ◽

Surface Passivation ◽

Wafer Surface ◽

Alumina Film ◽

Spin Coating Method ◽

Silicon Wafer Surface ◽

Coating Method

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Impact of fabrication of pyramidal structure on silicon wafer surface in ZnO/Si heterojunction

10.1063/5.0001996 ◽

2020 ◽

Author(s):

Manju Rani ◽

Jyoti Kashyap ◽

Udaibir Singh ◽

Avinashi Kapoor

Keyword(s):

Silicon Wafer ◽

Wafer Surface ◽

Pyramidal Structure ◽

Silicon Wafer Surface

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Impact of Thermal Processing on Silicon Wafer Surface Roughness

ECS Transactions ◽

10.1149/1.2982893 ◽

2019 ◽

Vol 16 (8) ◽

pp. 401-405 ◽

Cited By ~ 4

Author(s):

Larry W. Shive ◽

Brian L. Gilmore

Keyword(s):

Surface Roughness ◽

Silicon Wafer ◽

Thermal Processing ◽

Wafer Surface ◽

Silicon Wafer Surface

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Development of extreme microanalysis technology for metallic impurity on a silicon wafer surface

2018 International Symposium on Semiconductor Manufacturing (ISSM) ◽

10.1109/issm.2018.8651161 ◽

2018 ◽

Author(s):

Syuhei Yonezawa ◽

Kazuya Dobashi ◽

Shigeyuki ◽

Iwai ◽

Tatsuya Ichinose ◽

...

Keyword(s):

Silicon Wafer ◽

Metallic Impurity ◽

Wafer Surface ◽

Silicon Wafer Surface

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Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments

Optical and Quantum Electronics ◽

10.1007/s11082-018-1562-5 ◽

2018 ◽

Vol 50 (7) ◽

Cited By ~ 6

Author(s):

Reza Goodarzi ◽

Fereshteh Hajiesmaeilbaigi

Keyword(s):

Femtosecond Laser ◽

Silicon Wafer ◽

Laser Pulses ◽

Femtosecond Laser Pulses ◽

Wafer Surface ◽

Ripple Formation ◽

Silicon Wafer Surface ◽

Linearly Polarized

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Silicon Wafer Surface Reflectance Investigations by Using Different Surface Texturing Parameters

Proceedings of the National Academy of Sciences India Section A Physical Sciences ◽

10.1007/s40010-017-0384-3 ◽

2017 ◽

Vol 88 (4) ◽

pp. 617-623 ◽

Cited By ~ 1

Author(s):

Girija Moona ◽

Pankaj Kapruwan ◽

Rina Sharma ◽

V. N. Ojha

Keyword(s):

Silicon Wafer ◽

Surface Texturing ◽

Wafer Surface ◽

Surface Reflectance ◽

Silicon Wafer Surface

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The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer Surface

MATEC Web of Conferences ◽

10.1051/matecconf/20166301019 ◽

2016 ◽

Vol 63 ◽

pp. 01019

Author(s):

Dong Zhong ◽

Zhong Ming Li ◽

Chun Chen ◽

Ruo Lin Ruan

Keyword(s):

Shock Wave ◽

Laser Ablation ◽

Femtosecond Laser ◽

Silicon Wafer ◽

Femtosecond Laser Ablation ◽

Acoustic Characteristic ◽

Wafer Surface ◽

Silicon Wafer Surface ◽

Plasma Shock Wave ◽

Plasma Shock

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silicon wafer surface
Recently Published Documents

TOTAL DOCUMENTS

H-INDEX

Double-sided Silicon Wafer Surface Protection Method for Photolithography Process

Influence of silicon wafer surface roughness on semiconductor device characteristics

Self-organized fractal-like structures formation on the silicon wafer surface using the femtosecond laser pulses

Alumina film deposited by spin-coating method for silicon wafer surface passivation

Impact of fabrication of pyramidal structure on silicon wafer surface in ZnO/Si heterojunction

Impact of Thermal Processing on Silicon Wafer Surface Roughness

Development of extreme microanalysis technology for metallic impurity on a silicon wafer surface

Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments

Silicon Wafer Surface Reflectance Investigations by Using Different Surface Texturing Parameters

The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer Surface

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silicon wafer surfaceRecently Published Documents

TOTAL DOCUMENTS

H-INDEX

Double-sided Silicon Wafer Surface Protection Method for Photolithography Process

Influence of silicon wafer surface roughness on semiconductor device characteristics

Self-organized fractal-like structures formation on the silicon wafer surface using the femtosecond laser pulses

Alumina film deposited by spin-coating method for silicon wafer surface passivation

Impact of fabrication of pyramidal structure on silicon wafer surface in ZnO/Si heterojunction

Impact of Thermal Processing on Silicon Wafer Surface Roughness

Development of extreme microanalysis technology for metallic impurity on a silicon wafer surface

Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments

Silicon Wafer Surface Reflectance Investigations by Using Different Surface Texturing Parameters

The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer Surface

silicon wafer surface
Recently Published Documents