The DC arc as radiation source for optical emission spectroscopy

1986 ◽  
Vol 324 (7) ◽  
pp. 698-706
Author(s):  
Boško V. Pavlović
Keyword(s):  
Radiation Source ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dc Arc

scholarly journals Quantitative Analysis of Thin Films by dc Arc Optical Emission Spectroscopy

1978 ◽  
Vol 32 (3) ◽  
pp. 281-287 ◽  
Author(s):  
Arnold W. Hogrefe ◽  
Robert K. Lowry
Keyword(s):  
Thin Films ◽  
Silicon Dioxide ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Aluminum Film ◽  
Gravimetric Analysis ◽  
Mixed Powder ◽  
Nickel Chromium ◽  
Dc Arc

dc arc optical emission spectroscopy was investigated as a quantitative method for measuring compositions of thin films commonly used in fabricating semiconductor devices. Thin films studied were nickel-chromium, phosphorus-silicon dioxide, and silicon-aluminum. Film samples were obtained by direct deposition onto ordinary graphite electrodes mounted in vacuum deposition chambers. Standards for each film were prepared by evaporating series of synthetic solutions approximating film compositions onto electrode tips, or by preparing appropriately weighed mixed powder standards. Calibration curves were established by burning multiple sets of these standard electrodes in a 15-A dc arc and plotting the intensity ratios for selected atomic lines of the analyte elements. Correlation of emission results with atomic absorption, electron microprobe, and gravimetric analysis showed absolute agreement to within ±3% for nickel-chromium, ± 0.3% for phosphorus-silicon dioxide, and ±0.2% for silicon-aluminum. Maximum relative percent error was 5, 10, and 12.5%, respectively. This technique has proved to be a rapid convenient process control tool in the manufacture of microelectronic devices.

Elemental Composition of Gallstone by DC Arc Optical Emission Spectroscopy

2013 ◽  
Vol 36 (4) ◽  
pp. 397-402 ◽  
Author(s):  
Shuchi Srivastava ◽  
Pavitra Tandon ◽  
Renu Singh ◽  
H. C. Gupta ◽  
K. N. Uttam
Keyword(s):  
Elemental Composition ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dc Arc

Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma

Nano Research ◽  
2018 ◽  
Vol 11 (3) ◽  
pp. 1470-1481 ◽  
Author(s):  
Jian Gao ◽  
Lei Zhou ◽  
Jingshuang Liang ◽  
Ziming Wang ◽  
Yue Wu ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Discharge Plasma ◽  
Arc Discharge ◽  
Optical Emission ◽  
Dc Arc
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