Field distribution near a paraboloid focus at the source position in the Fresnel zone

It is significant to note field aberrations (chromatic field aberration, coma, astigmatism and blurring due to curvature of field, defined by Glaser's aberration theory relative to the Blenden Freien System) of the objective lens in connection with the following three points of view; field aberrations increase as the resolution of the axial point improves by increasing the lens excitation (k2) and decreasing the half width value (d) of the axial lens field distribution; when one or all of the imaging lenses have axial imperfections such as beam deflection in image space by the asymmetrical magnetic leakage flux, the apparent axial point has field aberrations which prevent the theoretical resolution limit from being obtained.

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Development of a conical anode Fe-gun for low voltage SEM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100106958 ◽

1988 ◽

Vol 46 ◽

pp. 978-979

Author(s):

T. Miyokawa ◽

S. Norioka ◽

S. Goto

Keyword(s):

High Resolution ◽

Field Emission ◽

Low Voltage ◽

Irradiation Damage ◽

Cold Cathode ◽

Virtual Source ◽

Source Position ◽

Electrostatic Lens ◽

Electrostatic Lenses ◽

Wide Range

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.

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Field Distribution of Strongly Excited Magnetic Lenses

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100114323 ◽

1975 ◽

Vol 33 ◽

pp. 140-141

Author(s):

M. Strojnik

Keyword(s):

Flux Density ◽

Field Distribution ◽

Optical Axis ◽

Operating Point ◽

Pole Piece ◽

Partial Saturation ◽

Axial Flux ◽

The Stability

Magnetic lenses operating in partial saturation offer two advantages in HVEM: they exhibit small cs and cc and their power depends little on the excitation IN. Curve H, Fig. 1, shows that the maximal axial flux density Bz max of one of the lenses investigated changes between points (3) and (4) by 5% as the excitation varies by 40%. Consequently, the designer can relax the requirements concerning the stability of the lens current supplies. Saturated lenses, however, can only be used if (i) unwanted fields along the optical axis can be controlled, (ii) 'wobbling' of the optical axis due to inhomogeneous saturation around the pole piece faces is prevented, (iii) ample ampere-turns can be squeezed into the space available, and (iv) the lens operating point covers a sufficient range of accelerating voltages.

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