Spectroscopic study of a D.C. discharge in an argon-silane-nitrogen gas mixture under silicon nitride thin film deposition conditions
1990 ◽
Vol 10
(4)
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pp. 589-607
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2019 ◽
Vol 2019
(0)
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pp. J05408P
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1994 ◽
Vol 41
(5)
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pp. 703-708
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