Remote plasma enhanced metal organic chemical vapor deposition of TiN for diffusion barrier
1996 ◽
Vol 13
(5)
◽
pp. 510-514
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1999 ◽
Vol 17
(3)
◽
pp. 1101
◽
1998 ◽
Vol 37
(Part 2, No. 4A)
◽
pp. L406-L408
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1998 ◽
Vol 189-190
◽
pp. 321-324
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2004 ◽
Vol 43
(10)
◽
pp. 6963-6967
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2002 ◽
Vol 41
(Part 1, No. 10)
◽
pp. 6153-6164
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1998 ◽
Vol 37
(Part 1, No. 12A)
◽
pp. 6502-6505
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