In situ measurement and error compensation of optical freeform surfaces based on a two DOF fast tool servo

2015 ◽  
Vol 86 (1-4) ◽  
pp. 793-798 ◽  
Author(s):  
Qiang Liu ◽  
Shengli Pan ◽  
Heliang Yan ◽  
Xiaoqin Zhou ◽  
Rongqi Wang
2021 ◽  
Vol 484 ◽  
pp. 126665
Author(s):  
Yupeng Xiong ◽  
Tiancong Luo ◽  
Yifan Dai ◽  
Shanyong Chen ◽  
Guipeng Tie

2015 ◽  
Vol 6 (0) ◽  
pp. 527975-527975 ◽  
Author(s):  
Q. Liu ◽  
X. Zhou ◽  
P. Xu ◽  
X. Zhang

2013 ◽  
Vol 709 ◽  
pp. 281-285 ◽  
Author(s):  
Ya Hui Nie ◽  
Feng Zhou Fang ◽  
Xiao Dong Zhang

Fast tool servo is increasing applied to manufacture optical freeform surfaces, which are adopted in aerospace, imaging, bioengineering, energy fields to improve the performance of the system, simplify the structure of the system and lower cost. The existing FTS have limited stroke and bandwidth. FTS driven by electromagnetic force is discussed. The analysis of the magnetic circuit, the requirements of the system and the corresponding design parameters are studied. The designed FTS can realize the bandwidth of 0-100kHz with a special designed driver.


2017 ◽  
Vol 95 (5-8) ◽  
pp. 2071-2092 ◽  
Author(s):  
Linlin Zhu ◽  
Zexiao Li ◽  
Fengzhou Fang ◽  
Siyu Huang ◽  
Xiaodong Zhang

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