Three-dimensional nanofabrication by electron-beam-induced deposition using 200-keV electrons in scanning transmission electron microscope

2004 ◽  
Vol 80 (7) ◽  
pp. 1437-1441 ◽  
Author(s):  
Z.Q. Liu ◽  
K. Mitsuishi ◽  
K. Furuya
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Three Dimensional ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Beam Induced Deposition

Nanofabrication of Tungsten Structure by Electron-Beam-Induced Deposition in Scanning Transmission Electron Microscope

2004 ◽  
Vol 10 (S02) ◽  
pp. 566-567
Author(s):  
Z.Q. Liu ◽  
K. Mitsuishi ◽  
K. Furuya
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Beam Induced Deposition

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Aberration-Corrected Scanning Transmission Electron Microscope (STEM) Through-Focus Imaging for Three-Dimensional Atomic Analysis of Bismuth Segregation on Copper [001]/33° Twist Bicrystal Grain Boundaries

2016 ◽  
Vol 22 (3) ◽  
pp. 679-689 ◽  
Author(s):  
Charles Austin Wade ◽  
Mark J. McLean ◽  
Richard P. Vinci ◽  
Masashi Watanabe
Keyword(s):  
Electron Microscope ◽  
Grain Boundaries ◽  
Transmission Electron Microscope ◽  
Three Dimensional ◽  
Depth Resolution ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Aberration Corrected

AbstractScanning transmission electron microscope (STEM) through-focus imaging (TFI) has been used to determine the three-dimensional atomic structure of Bi segregation-induced brittle Cu grain boundaries (GBs). With TFI, it is possible to observe single Bi atom distributions along Cu [001] twist GBs using an aberration-corrected STEM operating at 200 kV. The depth resolution is ~5 nm. Specimens with GBs intentionally inclined with respect to the microscope’s optic axis were used to investigate Bi segregant atom distributions along and through the Cu GB. It was found that Bi atoms exist at most once per Cu unit cell along the GB, meaning that no continuous GB film is present. Therefore, the reduced fracture toughness of this particular Bi-doped Cu boundary would not be caused by fracture of Bi–Bi bonds.

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

2009 ◽  
Vol 367 (1903) ◽  
pp. 3825-3844 ◽  
Author(s):  
G. Behan ◽  
E. C. Cosgriff ◽  
Angus I. Kirkland ◽  
Peter D. Nellist
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Three Dimensional ◽  
Depth Resolution ◽  
Scanning Transmission Electron Microscope ◽  
Objective Lens ◽  
Optical Sectioning ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

The depth resolution for optical sectioning in the scanning transmission electron microscope is measured using the results of optical sectioning experiments of laterally extended objects. We show that the depth resolution depends on the numerical aperture of the objective lens as expected. We also find, however, that the depth resolution depends on the lateral extent of the object that is being imaged owing to a missing cone of information in the transfer function. We find that deconvolution methods generally have limited usefulness in this case, but that three-dimensional information can still be obtained with the aid of prior information for specific samples such as those consisting of supported nanoparticles. We go on to review how a confocal geometry may improve the depth resolution for extended objects. Finally, we present a review of recent work exploring the effect of dynamical diffraction in zone-axis-aligned crystals on the optical sectioning process.

Sign in / Sign up

Export Citation Format

Share Document