In situ measurements and modeling of carbon nanotube array growth kinetics during chemical vapor deposition

2005 ◽  
Vol 81 (2) ◽  
pp. 223-240 ◽  
Author(s):  
A.A. Puretzky ◽  
D.B. Geohegan ◽  
S. Jesse ◽  
I.N. Ivanov ◽  
G. Eres
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Growth Kinetics ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
In Situ Measurements ◽  
Nanotube Array ◽  
Carbon Nanotube Array

scholarly journals In Situ Measurement of Carbon Nanotube Growth Kinetics in a Rapid Thermal Chemical Vapor Deposition Reactor With Multizone Infrared Heating

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Moataz Abdulhafez ◽  
Jaegeun Lee ◽  
Mostafa Bedewy
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Infrared Heating ◽  
Ex Situ ◽  
Depth Of Field ◽  
Carbon Nanotube Growth ◽  
Nanotube Growth

Abstract Understanding and controlling the growth of vertically aligned carbon nanotube (VACNT) forests by chemical vapor deposition (CVD) is essential for unlocking their potential as candidate materials for next generation energy and mass transport devices. These advances in CNT manufacturing require developing in situ characterization techniques capable of interrogating how CNTs grow, interact, and self-assemble. Here we present a technique for real-time monitoring of VACNT forest height kinetics applied to a unique custom designed rapid thermal processing (RTP) reactor for CVD of VACNTs. While the integration of multiple infrared heating lamps enables creating designed spatiotemporal temperature profiles inside the reactor, they pose challenges for in situ measurements. Hence, our approach relies on contrast-adjusted videography and image processing, combined with calibration using 3D optical microscopy with large depth-of-field. Our work enables reliably measuring VACNT growth rates and catalytic lifetimes, which are not possible to measure using ex situ methods.

scholarly journals In Situ Evaluation of the Factors Controlling Carbon Nanotube Synthesis During Catalytic Chemical Vapor Deposition

2011 ◽  
Vol 17 (S2) ◽  
pp. 1520-1521
Author(s):  
R Sharma
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Catalytic Chemical Vapor Deposition ◽  
Carbon Nanotube Synthesis

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

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