Structure and electrical properties of HfO2 high-k films prepared by pulsed laser deposition on Si (100)

Hao Wang; Y. Wang; J. Feng; C. Ye; B. Y. Wang; H. B. Wang; Q. Li; Y. Jiang; A. P. Huang; Z. S. Xiao

doi:10.1007/s00339-008-4695-8

Structure and electrical properties of HfO2 high-k films prepared by pulsed laser deposition on Si (100)

Applied Physics A ◽

10.1007/s00339-008-4695-8 ◽

2008 ◽

Vol 93 (3) ◽

pp. 681-684 ◽

Cited By ~ 22

Author(s):

Hao Wang ◽

Y. Wang ◽

J. Feng ◽

C. Ye ◽

B. Y. Wang ◽

...

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

High K

Thermal stability and electrical properties of Zr silicate films for high-k gate-dielectric applications, as prepared by pulsed laser deposition

Applied Physics A ◽

10.1007/s00339-003-2187-4 ◽

2005 ◽

Vol 80 (2) ◽

pp. 321-324 ◽

Cited By ~ 7

Author(s):

J. Zhu ◽

Z.G. Liu ◽

M. Zhu ◽

G.L. Yuan ◽

J.M. Liu

Keyword(s):

Thermal Stability ◽

Electrical Properties ◽

Pulsed Laser Deposition ◽

Gate Dielectric ◽

Pulsed Laser ◽

Laser Deposition ◽

High K ◽

High K Gate Dielectric

Structural, optical and electrical properties of high-k ZrO2 dielectrics on Si prepared by plasma assisted pulsed laser deposition

Thin Solid Films ◽

10.1016/j.tsf.2012.06.042 ◽

2012 ◽

Vol 520 (20) ◽

pp. 6361-6367 ◽

Cited By ~ 36

Author(s):

W. Zhang ◽

Y. Cui ◽

Z.G. Hu ◽

W.L. Yu ◽

J. Sun ◽

...

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Optical And Electrical Properties ◽

High K

Optical, Structure and Electrical Properties of Pb1-xCdxS Thin Films by Pulsed Laser Deposition (PLD) Method

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/1095/1/012009 ◽

2021 ◽

Vol 1095 (1) ◽

pp. 012009

Author(s):

Nada K Abbas ◽

Haneen S Hakeem

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Optical Structure

Effect of Target Morphology on Morphological, Optical and Electrical Properties of FTO Thin Film Deposited by Pulsed Laser Deposition for MAPbBr3 Perovskite Solar Cell

Surfaces and Interfaces ◽

10.1016/j.surfin.2021.101117 ◽

2021 ◽

pp. 101117

Author(s):

Hamid Latif ◽

J. Liu ◽

D. Mo ◽

Rui Wang ◽

J. Zeng ◽

...

Keyword(s):

Thin Film ◽

Solar Cell ◽

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Perovskite Solar Cell ◽

Laser Deposition ◽

Optical And Electrical Properties

Interfacial composition and electrical properties of PtSi/Si1−xGex/Si diodes by molecular beam epitaxy (MBE) and pulsed laser deposition (PLD)

Applied Surface Science ◽

10.1016/s0169-4332(03)00679-2 ◽

2003 ◽

Vol 219 (3-4) ◽

pp. 249-255

Author(s):

Mei-cheng Li ◽

Lian-cheng Zhao ◽

Xue-kang Chen

Keyword(s):

Electrical Properties ◽

Molecular Beam Epitaxy ◽

Pulsed Laser Deposition ◽

Molecular Beam ◽

Pulsed Laser ◽

Laser Deposition ◽

Interfacial Composition

Optical and electrical properties between 04 and 12 μm for Sn-doped In_2O_3 films by pulsed laser deposition and cathode sputtering

Applied Optics ◽

10.1364/ao.46.005709 ◽

2007 ◽

Vol 46 (23) ◽

pp. 5709 ◽

Cited By ~ 3

Author(s):

Daniel Dubreuil ◽

Jean-Pierre Ganne ◽

Gérard Berginc ◽

Frédéric Terracher

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Optical And Electrical Properties ◽

Cathode Sputtering

Optimization of electrical properties of Al/LaAlO3/indium tin oxide capacitor by adjusting oxygen pressures in pulsed laser deposition and applying post-deposition annealing at low temperatures

Thin Solid Films ◽

10.1016/j.tsf.2013.12.032 ◽

2014 ◽

Vol 555 ◽

pp. 153-158 ◽

Cited By ~ 1

Author(s):

Jung-Ruey Tsai ◽

Wen-Sheng Feng ◽

Po-Hsiu Chien ◽

Kou-Chen Liu

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Low Temperatures ◽

Pulsed Laser ◽

Laser Deposition ◽

Post Deposition Annealing ◽

Post Deposition

Scanning tunneling microscopy study of the surface electrical properties of ZnO films grown by pulsed laser deposition

phys stat sol (a) ◽

10.1002/pssa.200306275 ◽

2003 ◽

Vol 195 (1) ◽

pp. 183-187 ◽

Cited By ~ 1

Author(s):

A. Urbieta ◽

P. Fernández ◽

J. Piqueras ◽

E. Vasco ◽

C. Zaldo

Keyword(s):

Electrical Properties ◽

Scanning Tunneling Microscopy ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Microscopy Study ◽

Laser Deposition ◽

Scanning Tunneling ◽

Zno Films ◽

Tunneling Microscopy ◽

Scanning Tunneling Microscopy Study

Nanomechanical and electrical properties of Nb thin films deposited on Pb substrates by pulsed laser deposition as a new concept photocathode for superconductor cavities

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/j.nima.2015.09.064 ◽

2015 ◽

Vol 804 ◽

pp. 132-136 ◽

Cited By ~ 7

Author(s):

F. Gontad ◽

A. Lorusso ◽

M. Panareo ◽

A.G. Monteduro ◽

G. Maruccio ◽

...

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition

Electrical Properties of ZnCoO films grown by Pulsed Laser Deposition Method

ECS Meeting Abstracts ◽

10.1149/ma2008-02/36/2341 ◽

2008 ◽

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Deposition Method