Optimization of electrical properties of Al/LaAlO3/indium tin oxide capacitor by adjusting oxygen pressures in pulsed laser deposition and applying post-deposition annealing at low temperatures

2014 ◽  
Vol 555 ◽  
pp. 153-158 ◽  
Author(s):  
Jung-Ruey Tsai ◽  
Wen-Sheng Feng ◽  
Po-Hsiu Chien ◽  
Kou-Chen Liu
Keyword(s):  
Electrical Properties ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Low Temperatures ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Post Deposition Annealing ◽  
Post Deposition

Highly conducting indium tin oxide films grown by ultraviolet-assisted pulsed laser deposition at low temperatures

2004 ◽  
Vol 453-454 ◽  
pp. 256-261 ◽  
Author(s):  
V. Craciun ◽  
D. Craciun ◽  
X. Wang ◽  
T.J. Anderson ◽  
R.K. Singh
Keyword(s):  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Low Temperatures ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Tin Oxide Films

Effect of laser irradiation on the properties of indium tin oxide films deposited by pulsed laser deposition

2001 ◽  
Vol 177 (1-2) ◽  
pp. 114-121 ◽  
Author(s):  
F.O Adurodija ◽  
H Izumi ◽  
T Ishihara ◽  
H Yoshioka ◽  
M Motoyama ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Laser Irradiation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Tin Oxide Films

Pulsed Laser Deposition of Low-Resistivity Indium Tin Oxide Thin Films at Low Substrate Temperature

1999 ◽  
Vol 38 (Part 1, No. 5A) ◽  
pp. 2710-2716 ◽  
Author(s):  
Frederick Ojo Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Hiroshi Matsui ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films ◽  
Low Resistivity

Effect of oxygen content on piezoresistivity of indium tin oxide thin films prepared by pulsed laser deposition

2005 ◽  
Vol 97 (8) ◽  
pp. 083502 ◽  
Author(s):  
H. Fang ◽  
T. Miller ◽  
B. R. Rogers ◽  
R. H. Magruder ◽  
R. A. Weller
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Oxygen Content ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films ◽  
Effect Of Oxygen

Pulsed Laser Deposition of Crystalline Indium Tin Oxide Films at Room Temperature by Substrate Laser Irradiation

2000 ◽  
Vol 39 (Part 2, No. 4B) ◽  
pp. L377-L379 ◽  
Author(s):  
Frederick O. Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Muneyuki Motoyama ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Laser Irradiation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Tin Oxide Films

Pulsed laser deposition of nanostructured indium-tin-oxide film

2010 ◽  
Author(s):  
Thian Kok Yong ◽  
Chen Hon Nee ◽  
Seong Shan Yap ◽  
Wee Ong Siew ◽  
György Sáfran ◽  
...  
Keyword(s):  
Oxide Film ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition
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