A large thrust trans-scale precision positioning stage based on the inertial stick–slip driving
2019 ◽
Vol 25
(10)
◽
pp. 3713-3721
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2012 ◽
Vol 2
(2)
◽
pp. 1-14
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2019 ◽
Vol 297
◽
pp. 111547
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Keyword(s):
2011 ◽
Vol 225-226
◽
pp. 684-687
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Keyword(s):
2013 ◽
Vol 694-697
◽
pp. 767-770
2015 ◽
Vol 51
(2)
◽
pp. 198
◽