Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer

2021 ◽  
Author(s):  
Mandeep Jangra ◽  
Dhairya Singh Arya ◽  
Robin Khosla ◽  
Satinder K. Sharma
Keyword(s):  
Maskless Lithography ◽  
Mems Accelerometer ◽  
Polymer Mems

Innovative Technologies for Maskless Lithography and Non-Conventional Patterning

2008 ◽  
Author(s):  
Avideh Zakhor ◽  
Andrew Neureuther ◽  
R. F Pease ◽  
Olav Solgaard ◽  
Vivek Subramanian ◽  
...  
Keyword(s):  
Maskless Lithography ◽  
Innovative Technologies

Low-cost MEMS accelerometer network for rotating machine vibration diagnostics

2020 ◽  
Vol 23 (7) ◽  
pp. 25-33
Author(s):  
Luciane Agnoletti dos Santos Pedotti ◽  
Ricardo Mazza Zago ◽  
Mateus Giesbrecht ◽  
Fabiano Fruett
Keyword(s):  
Low Cost ◽  
Vibration Diagnostics ◽  
Mems Accelerometer ◽  
Machine Vibration ◽  
Rotating Machine

scholarly journals Displacement Estimation Based on Optical and Inertial Sensor Fusion

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski
Keyword(s):  
Sensor Fusion ◽  
Inertial Sensor ◽  
External Disturbance ◽  
Linear Displacement ◽  
Measuring System ◽  
Displacement Estimation ◽  
Mems Accelerometer ◽  
Pedestrian Navigation ◽  
Complementary Filter ◽  
Optical Flow Sensor

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.

Development of A Z-Axis Out of Plane MEMS Accelerometer

2021 ◽  
Author(s):  
Abhiraj Basavanna ◽  
Matthias Dienger ◽  
Jan Rockstroh ◽  
Steffen Keller ◽  
Alfons Dehe
Keyword(s):  
Mems Accelerometer ◽  
Out Of Plane

A CMOS-MEMS Accelerometer with U-channel Suspended Gate SOI FET

2021 ◽  
pp. 1-1
Author(s):  
Pramod Martha ◽  
Naveen Kadayinti ◽  
V. Seena
Keyword(s):  
Mems Accelerometer ◽  
Cmos Mems
Sign in / Sign up

Export Citation Format

Share Document