Sigma-delta (ΣΔ) closed-loop operation is the best candidate for realizing the interface circuit of MEMS accelerometers. However, stability and reliability problems are still the main obstacles hindering its further development for high-end applications. In situ self-testing and calibration is an alternative way to solve these problems in the current process condition, and thus, has received a lot of attention in recent years. However, circuit methods for self-testing of ΣΔ closed-loop accelerometers are rarely reported. In this paper, we propose a fifth-order ΣΔ closed-loop interface for a capacitive MEMS accelerometer. The nonlinearity problem of the system is detailed discussed, the source of it is analyzed, and the solutions are given. Furthermore, a built-in self-test (BIST) unit is integrated on-chip for in situ self-testing of the loop distortion. In BIST mode, a digital electrostatic excitation is generated by an on-chip digital resonator, which is also ΣΔ modulated. By single-bit ΣΔ-modulation, the noise and linearity of excitation is effectively improved, and a higher detection level for distortion is easily achieved, as opposed to the physical excitation generated by the motion of laboratory equipment.
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