Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method

1998 ◽  
Vol 5 (2) ◽  
pp. 90-92 ◽  
Author(s):  
T. Shimizu ◽  
Y. Murakoshi ◽  
T. Sano ◽  
R. Maeda ◽  
S. Sugiyama
Keyword(s):  
Aspect Ratio ◽  
Injection Molding ◽  
High Aspect Ratio ◽  
Metal Injection Molding ◽  
Micro Parts

Fabrication of High Aspect Ratio Microscale Rod Arrays Using Metal Injection Molding

2013 ◽  
Vol 716 ◽  
pp. 430-433
Author(s):  
Won Sik Lee ◽  
Jin Man Jang ◽  
Berm Ha Cha ◽  
Se Hyun Ko
Keyword(s):  
Aspect Ratio ◽  
Injection Molding ◽  
Grain Growth ◽  
High Aspect Ratio ◽  
Metal Injection Molding ◽  
Aspect Ratios ◽  
Average Size ◽  
Rod Array

In this work, micro rod arrays of 50 um and 200 um in diameter, respectively, were fabricated by 316L metal injection molding. Acryl sacrificial mold was used for the 50 um rod array. Aspect ratios were about 8 and 6 in 50 um and 200 um rod arrays, respectively and the bending of the rods occured due to high aspect ratio in debinding and sintering steps. Also, severe grain growth occurred at rod surface by sintering for 3 hrs at 1300°C and the average size was measured to be about 70 um.

Manufacture of High Aspect Ratio Bulk Titanium Micro-Parts by Inductively Coupled Plasma Etching

2008 ◽  
Author(s):  
Gang Zhao ◽  
Qiong Shu ◽  
Yue Li ◽  
Jing Chen
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Inductively Coupled Plasma ◽  
Etching Rate ◽  
Sidewall Roughness ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Novel Technology ◽  
Micro Parts ◽  
Etching Mask

A novel technology is developed to fabricate high aspect ratio bulk titanium micro-parts by inductively coupled plasma (ICP) etching. An optimized etching rate of 0.9 μm/min has been achieved with an aspect ratio higher than 10:1. For the first time, SU-8 is used as titanium etching mask instead of the traditional hard mask such as TiO2 or SiO2. With an effective selectivity of 3 and a spun-on thickness beyond 100 μm, vertical etching sidewall and low sidewall roughness are obtained. Ultra-deep titanium etching up to 200 μm has been realized, which is among the best of the present reports. Titanium micro-springs and planks are successfully fabricated with this approach.

scholarly journals Fabrication and Evaluation of Micro Parts by Metal Injection Molding

2004 ◽  
Vol 70 (698) ◽  
pp. 1522-1528 ◽  
Author(s):  
Toshiko OSADA ◽  
Kazuaki NISHIYABU ◽  
Satoru MATSUZAKI ◽  
Shigeo TANAKA ◽  
Hideshi MIURA
Keyword(s):  
Injection Molding ◽  
Metal Injection Molding ◽  
Micro Parts

Fabrication of High Aspect Ratio Microcoils Using X-Ray Lithography

2010 ◽  
Author(s):  
Daiji Noda ◽  
Masaru Setomoto ◽  
Tadashi Hattori
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
High Performance ◽  
Three Dimensional ◽  
Fabrication Process ◽  
Electromagnetic Actuators ◽  
Pipe Surface ◽  
Suction Force ◽  
X Ray ◽  
Micro Parts

Recently, the demand of micro-fabrications such as micro-sensors, microcoils, micro-actuators etc is increasing. Actuators account for a large percentage and volume and weight of a product compared with other parts. Therefore, the progress in downsizing of actuators was required. In order to resolve these problems, the key technology to realizing micro-devices is micro-fabrication process. Particularly, it is essential to the technologies for processing high aspect ratio structures in the production of micro-parts. We have proposed a three-dimensional fabrication process using X-ray lithography technique, and fabricated spiral microcoils having coil lines of narrow pitch and high aspect ratio structures. We have fabricated spiral microcoils at a pitch of 60 μm, and aspect ratio of about 5 using X-ray lithography and narrow metallization techniques on acrylic pipe surface. In addition, we also estimated the suction force of electromagnetic actuators using these microcoils. Measurement results were relatively in good agreement with theoretical values using high aspect ratio microcoils. It is very expected that the high performance microcoils could be manufactured in spite of miniature size.

Plastic Injection Molding of High-Aspect Ratio Micro-Rods

2006 ◽  
Vol 21 (8) ◽  
pp. 824-831 ◽  
Author(s):  
Nan Shing Ong ◽  
Honglin Zhang ◽  
Wai Hoong Woo
Keyword(s):  
Aspect Ratio ◽  
Injection Molding ◽  
High Aspect Ratio ◽  
Plastic Injection Molding ◽  
Plastic Injection
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