Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error

2021 ◽  
Vol 28 (1) ◽  
pp. 48-57
Author(s):  
Sungtae Kim ◽  
Yangjin Kim ◽  
Sung-Chul Shin ◽  
Kenichi Hibino ◽  
Naohiko Sugita
Sensors ◽  
2019 ◽  
Vol 19 (23) ◽  
pp. 5202 ◽  
Author(s):  
Yu ◽  
Ji ◽  
Xue ◽  
Wang

Traditional filtering methods only focused on improving the peak signal-to-noise ratio of the single fringe pattern, which ignore the filtering effect on phase extraction. Fringe phase-shifting field based fuzzy quotient space-oriented partial differential equations filtering method is proposed to reduce the phase error caused by Gaussian noise while filtering. First, the phase error distribution that is caused by Gaussian noise is analyzed. Furthermore, by introducing the fringe phase-shifting field and the theory of fuzzy quotient space, the modified filtering direction can be adaptively obtained, which transforms the traditional single image filtering into multi-image filtering. Finally, the improved fourth-order oriented partial differential equations with fidelity item filtering method is established. Experiments demonstrated that the proposed method achieves a higher signal-to-noise ratio and lower phase error caused by noise, while also retaining more edge details.


2019 ◽  
Vol 888 ◽  
pp. 11-16 ◽  
Author(s):  
Yoshitaka Takahashi

Phase-shifting interferometry is widely used because it can measure phase with high accuracy. Changing optical path length with a PZT transducer and changing frequency of the optical source with a laser diode (LD) are two common methods to apply the desired phase shift between the arms in the interferometer. In any case, however, it is not easy to apply the desired shift accurately, and if not, measurement errors occur. In order to reduce the errors, the effect of the phase shift error has been analyzed numerically especially in the case with LD.


2020 ◽  
Vol 31 (4) ◽  
pp. 045009
Author(s):  
Kaining Zhang ◽  
Osami Sasaki ◽  
Songjie Luo ◽  
Takamasa Suzuki ◽  
Yongxin Liu ◽  
...  

2019 ◽  
Vol 118 ◽  
pp. 102-108 ◽  
Author(s):  
Yingying Wan ◽  
Yiping Cao ◽  
Cheng Chen ◽  
Yapin Wang ◽  
Guangkai Fu ◽  
...  

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