A Study on Image Noise Effect to the Phase Error in Phase Shifting Profilometry

Author(s):  
Yeon-Serk Yu
Sensors ◽  
2019 ◽  
Vol 19 (23) ◽  
pp. 5202 ◽  
Author(s):  
Yu ◽  
Ji ◽  
Xue ◽  
Wang

Traditional filtering methods only focused on improving the peak signal-to-noise ratio of the single fringe pattern, which ignore the filtering effect on phase extraction. Fringe phase-shifting field based fuzzy quotient space-oriented partial differential equations filtering method is proposed to reduce the phase error caused by Gaussian noise while filtering. First, the phase error distribution that is caused by Gaussian noise is analyzed. Furthermore, by introducing the fringe phase-shifting field and the theory of fuzzy quotient space, the modified filtering direction can be adaptively obtained, which transforms the traditional single image filtering into multi-image filtering. Finally, the improved fourth-order oriented partial differential equations with fidelity item filtering method is established. Experiments demonstrated that the proposed method achieves a higher signal-to-noise ratio and lower phase error caused by noise, while also retaining more edge details.


2019 ◽  
Vol 888 ◽  
pp. 11-16 ◽  
Author(s):  
Yoshitaka Takahashi

Phase-shifting interferometry is widely used because it can measure phase with high accuracy. Changing optical path length with a PZT transducer and changing frequency of the optical source with a laser diode (LD) are two common methods to apply the desired phase shift between the arms in the interferometer. In any case, however, it is not easy to apply the desired shift accurately, and if not, measurement errors occur. In order to reduce the errors, the effect of the phase shift error has been analyzed numerically especially in the case with LD.


2019 ◽  
Vol 118 ◽  
pp. 102-108 ◽  
Author(s):  
Yingying Wan ◽  
Yiping Cao ◽  
Cheng Chen ◽  
Yapin Wang ◽  
Guangkai Fu ◽  
...  

2008 ◽  
Vol 47 (22) ◽  
pp. 4068 ◽  
Author(s):  
Joonku Hahn ◽  
Hwi Kim ◽  
Seong-Woo Cho ◽  
Byoungho Lee

2020 ◽  
Vol 10 (9) ◽  
pp. 3250
Author(s):  
Fuqing Miao ◽  
Seokyoung Ahn ◽  
Yangjin Kim

In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10N − 9 phase-shifting algorithm comprising a new polynomial window function and a DFT is developed. A new polynomial window function is developed based on characteristic polynomial theory. The characteristic of the new 10N − 9 algorithm is represented in the frequency domain by Fourier description. The phase error of the new algorithm is also discussed and compared with other phase-shifting algorithms. The surface profile of a silicon wafer was measured by using the 10N − 9 algorithm and a wavelength-tuning interferometer. The repeatability measurement error across 20 experiments was 2.045 nm, which indicates that the new 10N − 9 algorithm outperforms the conventional phase-shifting algorithm.


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