Simulation and experimental determination of the macro-scale layer thickness distribution of electrodeposited Cu-line patterns on a wafer substrate

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Bart Van Den Bossche ◽  
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pp. 1929-1934 ◽  
Author(s):  
E. V. Ubyĭvovk ◽  
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...  

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Vol 170 (1-2) ◽  
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M. Iwase ◽  
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1986 ◽  
Vol 170 (1-2) ◽  
pp. A239
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A. Toriumi ◽  
M. Yoshimi ◽  
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