Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition

Gustavo Sánchez; B. Abdallah; P. Tristant; C. Dublanche-Tixier; M. A. Djouadi; M. P. Besland; P. Y. Jouan; A. Bologna Alles

doi:10.1007/s10853-009-3847-3

Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition

Journal of Materials Science ◽

10.1007/s10853-009-3847-3 ◽

2009 ◽

Vol 44 (22) ◽

pp. 6125-6134 ◽

Cited By ~ 10

Author(s):

Gustavo Sánchez ◽

B. Abdallah ◽

P. Tristant ◽

C. Dublanche-Tixier ◽

M. A. Djouadi ◽

...

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Microstructure And Mechanical Properties

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Investigation of the tribological behavior and its relationship to the microstructure and mechanical properties of a-SiC:H films elaborated by low frequency plasma assisted chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.09.024 ◽

2010 ◽

Vol 519 (4) ◽

pp. 1266-1271 ◽

Cited By ~ 18

Author(s):

A. Soum-Glaude ◽

G. Rambaud ◽

S.E. Grillo ◽

L. Thomas

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Tribological Behavior ◽

Low Frequency ◽

Chemical Vapor ◽

Microstructure And Mechanical Properties ◽

Frequency Plasma

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Microstructure and mechanical properties of Si3N4f/BN composites with BN interphase prepared by chemical vapor deposition of borazine

Journal of the European Ceramic Society ◽

10.1016/j.jeurceramsoc.2019.11.054 ◽

2020 ◽

Vol 40 (4) ◽

pp. 1139-1148

Author(s):

Chunrong Zou ◽

Bin Li ◽

Kun Liu ◽

Xuejin Yang ◽

Duan Li

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Microstructure And Mechanical Properties

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Microstructure and mechanical properties of Ti-Si-C-N films synthesized by plasma-enhanced chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.05.073 ◽

2007 ◽

Vol 202 (4-7) ◽

pp. 915-919 ◽

Cited By ~ 30

Author(s):

Sudeep Abraham ◽

Eun Young Choi ◽

Namhyun Kang ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Microstructure And Mechanical Properties

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Phase composition, microstructure and mechanical properties of ZrC coatings produced by chemical vapor deposition

Ceramics International ◽

10.1016/j.ceramint.2013.06.059 ◽

2014 ◽

Vol 40 (1) ◽

pp. 707-713 ◽

Cited By ~ 35

Author(s):

Ying Long ◽

Athar Javed ◽

Jie Chen ◽

Zhao-ke Chen ◽

Xiang Xiong

Keyword(s):

Mechanical Properties ◽

Phase Composition ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Microstructure And Mechanical Properties

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Effect of annealing on the microstructure and mechanical properties of Ti0.17Al0.83N coating prepared by low pressure chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127014 ◽

2021 ◽

Vol 412 ◽

pp. 127014

Author(s):

Fangfang Zeng ◽

Lianchang Qiu ◽

Yong Du ◽

Liying Wu ◽

Mingqiang Chu ◽

...

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Microstructure And Mechanical Properties ◽

Pressure Chemical

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The effect of B and C addition on microstructure and mechanical properties of TiN hard coatings grown by chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2019.05.002 ◽

2019 ◽

Vol 688 ◽

pp. 137283 ◽

Cited By ~ 7

Author(s):

Christina Kainz ◽

Nina Schalk ◽

Michael Tkadletz ◽

Christian Mitterer ◽

Christoph Czettl

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hard Coatings ◽

Microstructure And Mechanical Properties

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Boron Content on Microstructure and Mechanical Properties of Amorphous Boron Carbide by Chemical Vapor Deposition

Journal of Inorganic Materials ◽

10.15541/jim20170069 ◽

2017 ◽

Vol 32 (11) ◽

pp. 1228

Author(s):

QIAO Zhen-Jie ◽

GAO Le ◽

FENG Qian ◽

HU Jian-Bao ◽

DONG Shao-Ming ◽

...

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Boron Carbide ◽

Vapor Deposition ◽

Boron Content ◽

Chemical Vapor ◽

Amorphous Boron ◽

Microstructure And Mechanical Properties

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Fluidized bed chemical vapor deposition of pyrolytic carbon-III. Relationship between microstructure and mechanical properties

Carbon ◽

10.1016/j.carbon.2015.05.009 ◽

2015 ◽

Vol 91 ◽

pp. 346-357 ◽

Cited By ~ 19

Author(s):

Huixing Zhang ◽

Eddie López-Honorato ◽

Ping Xiao

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Fluidized Bed ◽

Vapor Deposition ◽

Chemical Vapor ◽

Pyrolytic Carbon ◽

Microstructure And Mechanical Properties

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Effects of deposition parameters on the microstructure and mechanical properties of Ti(C,N) produced by moderate temperature chemical vapor deposition (MT-CVD) on cemented carbides

Vacuum ◽

10.1016/j.vacuum.2021.110650 ◽

2021 ◽

pp. 110650

Author(s):

Maoxiang Zhu ◽

Sofiane Achache ◽

Pascal Boulet ◽

Agathe Virfeu ◽

Jean-François Pierson ◽

...

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Moderate Temperature ◽

Cemented Carbides ◽

Microstructure And Mechanical Properties ◽

Deposition Parameters

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Mechanical Properties of the Carbonaceous Films Formed by Focused Ion-beam-assisted Chemical Vapor Deposition

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.130.949 ◽

2010 ◽

Vol 130 (10) ◽

pp. 949-954

Author(s):

Junichi Yanagisawa

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Chemical Vapor

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