High-speed preparation and dielectric properties of BaTi4O9 film by laser chemical vapor deposition

2011 ◽  
Vol 23 (4) ◽  
pp. 897-900 ◽  
Author(s):  
Dongyun Guo ◽  
Takashi Goto ◽  
Chuanbin Wang ◽  
Qiang Shen ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Dielectric Properties ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition

High‐speed laser chemical vapor deposition of copper: A search for optimum conditions

1989 ◽  
Vol 65 (6) ◽  
pp. 2470-2474 ◽  
Author(s):  
B. Markwalder ◽  
M. Widmer ◽  
D. Braichotte ◽  
H. van den Bergh
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Optimum Conditions ◽  
Laser Chemical Vapor Deposition

High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition

2013 ◽  
Vol 97 (3) ◽  
pp. 952-958 ◽  
Author(s):  
Song Zhang ◽  
Qingfang Xu ◽  
Rong Tu ◽  
Takashi Goto ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

Dielectric properties of Ba4Ti13O30 film prepared by laser chemical vapor deposition

2011 ◽  
Vol 47 (3) ◽  
pp. 1559-1561 ◽  
Author(s):  
Dongyun Guo ◽  
Akihiko Ito ◽  
Takashi Goto ◽  
Rong Tu ◽  
Chuanbin Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Dielectric Properties ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition
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