Characterization of aluminum-doped zinc oxide thin films by RF magnetron sputtering at different substrate temperature and sputtering power

Effects of substrate temperature on properties of the aluminum-doped zinc oxide thin films deposited by RF magnetron sputtering

10.1117/12.843507 ◽

2009 ◽

Author(s):

Yanyan Yang ◽

Xiangbin Zeng

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Synthesis and Characterization of B2O3-Doped Zinc Oxide Thin Films Prepared via RF-Magnetron Sputtering

10.1143/jjap.45.228 ◽

2006 ◽

Vol 45 (1A) ◽

pp. 228-230 ◽

Cited By ~ 1

Author(s):

Chung-Hsin Lu ◽

Yu-Hsiang Huang ◽

Ashok Dhobale

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Synthesis And Characterization ◽

Oxide Thin Films

Aluminum-Doped Zinc Oxide Thin Films Prepared by Sol-Gel and RF Magnetron Sputtering

Acta Physica Polonica A ◽

10.12693/aphyspola.120.149 ◽

2011 ◽

Vol 120 (1) ◽

pp. 149-152 ◽

Cited By ~ 6

Author(s):

G.M. Wu ◽

Y.F. Chen ◽

H.C. Lu

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Sol Gel ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

10.1143/jjap.23.l280 ◽

1984 ◽

Vol 23 (Part 2, No. 1) ◽

pp. L280-L282 ◽

Cited By ~ 464

Author(s):

Tadatsugu Minami ◽

Hidehito Nanto ◽

Shinzo Takata

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

10.1143/jjap.24.l605 ◽

1985 ◽

Vol 24 (Part 2, No. 8) ◽

pp. L605-L607 ◽

Cited By ~ 115

Author(s):

Tadatsugu Minami ◽

Hidehito Nanto ◽

Shinzo Takata

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

The properties of aluminum-doped zinc oxide thin films prepared by rf-magnetron sputtering from nanopowder targets

Materials Science and Engineering C ◽

10.1016/j.msec.2007.10.006 ◽

2008 ◽

Vol 28 (5-6) ◽

pp. 613-617 ◽

Cited By ~ 53

Author(s):

Z. Ben Ayadi ◽

L. El Mir ◽

K. Djessas ◽

S. Alaya

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Lowering the resistivity of aluminum doped zinc oxide thin films by controlling the self-bias during RF magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2020.126306 ◽

2020 ◽

Vol 402 ◽

pp. 126306 ◽

Cited By ~ 1

Author(s):

Eugen Stamate

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

The Self ◽

Oxide Thin Films ◽

Self Bias ◽

The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-006-9039-x ◽

2006 ◽

Vol 17 (12) ◽

pp. 973-977 ◽

Cited By ~ 13

Author(s):

Yeon-Keon Moon ◽

Se-Hyun Kim ◽

Jong-Wan Park

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Influence Of Substrate

Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

10.1143/jjap.24.l851 ◽

1985 ◽

Vol 24 (10A) ◽

pp. L851 ◽

Cited By ~ 1

Author(s):

Tadatsugu Minami ◽

Hidehito Nanto ◽

Shinzo Takata

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abec25 ◽

2021 ◽

Vol 30 (4) ◽

pp. 045002

Author(s):

Mihai-Andrei Petrea ◽

Eugen Stamate

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Spatial Distribution ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Plasma Parameters ◽

Aluminum Doped Zinc Oxide ◽

Electrostatic Probe