The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-006-9039-x ◽

2006 ◽

Vol 17 (12) ◽

pp. 973-977 ◽

Author(s):

Yeon-Keon Moon ◽

Se-Hyun Kim ◽

Jong-Wan Park

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Influence Of Substrate

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Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abec25 ◽

2021 ◽

Vol 30 (4) ◽

pp. 045002

Author(s):

Mihai-Andrei Petrea ◽

Eugen Stamate

Keyword(s):

Spatial Distribution ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Plasma Parameters ◽

Aluminum Doped Zinc Oxide ◽

Electrostatic Probe

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

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Influence of Substrate Temperature on Properties of Indium Tin Oxide Thin Films Prepared by DC Magnetron Sputtering

ECS Transactions ◽

10.1149/1.3694465 ◽

2019 ◽

Vol 44 (1) ◽

pp. 1311-1316 ◽

Author(s):

Juan Xu ◽

Yujie Yuan ◽

Fang Wang ◽

Kailiang Zhang

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Influence Of Substrate

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Influence of Substrate Temperature on Properties of Aluminum-Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering

Acta Optica Sinica ◽

10.3788/aos201131.0531001 ◽

2011 ◽

Vol 31 (5) ◽

pp. 0531001 ◽

Author(s):

杨昌虎 Yang Changhu ◽

马忠权 Ma Zhongquan ◽

袁剑辉 Yuan Jianhui

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Oxide Films ◽

Dc Magnetron Sputtering ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide ◽

Influence Of Substrate

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Substrate-dependent Internal Stress of Aluminum-doped Zinc-oxide Thin Films Deposited by DC Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.58.787 ◽

2011 ◽

Vol 58 (4) ◽

pp. 787-791 ◽

Author(s):

Taewon Kim

Keyword(s):

Magnetron Sputtering ◽

Internal Stress ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide

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Effects of substrate temperature on properties of the aluminum-doped zinc oxide thin films deposited by RF magnetron sputtering

10.1117/12.843507 ◽

2009 ◽

Author(s):

Yanyan Yang ◽

Xiangbin Zeng

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide

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Characterization of aluminum-doped zinc oxide thin films by RF magnetron sputtering at different substrate temperature and sputtering power

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-012-0769-7 ◽

2012 ◽

Vol 24 (1) ◽

pp. 166-171 ◽

Author(s):

Hung-Wei Wu ◽

Ru-Yuan Yang ◽

Chin-Min Hsiung ◽

Chien-Hsun Chu

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Power ◽

Aluminum Doped Zinc Oxide

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Effects of Oxygen Flow Ratio and Thermal Annealing on Defect Evolution of Aluminum Doped Zinc Oxide Thin Films by Reactive DC Magnetron Sputtering

Journal of Physics Condensed Matter ◽

10.1088/1361-648x/ac1f50 ◽

2021 ◽

Author(s):

Chao Ping Liu ◽

Zhan Hua Li ◽

Kingsley Egbo ◽

Cheuk Kai Kwok ◽

Xiao Hu Lv ◽

...

Keyword(s):

Magnetron Sputtering ◽

Thermal Annealing ◽

Oxygen Flow ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Defect Evolution ◽

Aluminum Doped Zinc Oxide

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Effect of Substrate Temperature on Optical Properties of Aluminum Zinc Oxide Thin Films Deposited by DC Magnetron Sputtering

10.1063/1.3646813 ◽

2011 ◽

Author(s):

B. Rajesh Kumar ◽

T. Subba Rao ◽

P. Predeep ◽

Mrinal Thakur ◽

M. K. Ravi Varma

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Zinc Oxide

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Influence of oxygen and argon flow on properties of aluminum-doped zinc oxide thin films prepared by magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2014.07.021 ◽

2014 ◽

Vol 566 ◽

pp. 32-37 ◽

Author(s):

Hua Zhu ◽

Hemei Wang ◽

Wenqiong Wan ◽

Shijin Yu ◽

XiaoWei Feng

Keyword(s):

Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide

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