Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Mihai-Andrei Petrea; Eugen Stamate

doi:10.1088/1361-6595/abec25

Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abec25 ◽

2021 ◽

Vol 30 (4) ◽

pp. 045002

Author(s):

Mihai-Andrei Petrea ◽

Eugen Stamate

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Spatial Distribution ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Plasma Parameters ◽

Aluminum Doped Zinc Oxide ◽

Electrostatic Probe

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Cited By ~ 10

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

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The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-006-9039-x ◽

2006 ◽

Vol 17 (12) ◽

pp. 973-977 ◽

Cited By ~ 13

Author(s):

Yeon-Keon Moon ◽

Se-Hyun Kim ◽

Jong-Wan Park

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide ◽

Influence Of Substrate

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Substrate-dependent Internal Stress of Aluminum-doped Zinc-oxide Thin Films Deposited by DC Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.58.787 ◽

2011 ◽

Vol 58 (4) ◽

pp. 787-791 ◽

Cited By ~ 6

Author(s):

Taewon Kim

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Internal Stress ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide

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Effects of Oxygen Flow Ratio and Thermal Annealing on Defect Evolution of Aluminum Doped Zinc Oxide Thin Films by Reactive DC Magnetron Sputtering

Journal of Physics Condensed Matter ◽

10.1088/1361-648x/ac1f50 ◽

2021 ◽

Author(s):

Chao Ping Liu ◽

Zhan Hua Li ◽

Kingsley Egbo ◽

Cheuk Kai Kwok ◽

Xiao Hu Lv ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Thermal Annealing ◽

Oxygen Flow ◽

Flow Ratio ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Defect Evolution ◽

Aluminum Doped Zinc Oxide

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Influence of oxygen and argon flow on properties of aluminum-doped zinc oxide thin films prepared by magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2014.07.021 ◽

2014 ◽

Vol 566 ◽

pp. 32-37 ◽

Cited By ~ 4

Author(s):

Hua Zhu ◽

Hemei Wang ◽

Wenqiong Wan ◽

Shijin Yu ◽

XiaoWei Feng

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Oxide Thin Films ◽

Argon Flow ◽

Aluminum Doped Zinc Oxide

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Properties of double-layered Ga-doped Al-zinc-oxide/titanium-doped indium–tin-oxide thin films prepared by dc magnetron sputtering applied for Si-based thin film solar cells

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3651099 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06B104

Author(s):

Chao-Chun Wang ◽

Dong-Sing Wuu ◽

Yang-Shih Lin ◽

Shui-Yang Lien ◽

Yung-Chuan Huang ◽

...

Keyword(s):

Thin Film ◽

Thin Films ◽

Zinc Oxide ◽

Solar Cells ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Solar Cells ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.04.084 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6910-6915 ◽

Cited By ~ 8

Author(s):

Hyeongsik Park ◽

Kyungsoo Jang ◽

Krishna Kumar ◽

Shihyun Ahn ◽

Jaehyun Cho ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Mechanism Analysis ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

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Effects of Oxygen Flux on the Aluminum Doped Zinc Oxide Thin Films By Direct Current Magnetron Sputtering

Physics Procedia ◽

10.1016/j.phpro.2012.03.619 ◽

2012 ◽

Vol 32 ◽

pp. 687-695 ◽

Cited By ~ 3

Author(s):

L.N. Li ◽

Y. Zhao ◽

X.L. Chen ◽

J. Sun ◽

X.D. Zhang

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Direct Current ◽

Oxygen Flux ◽

Oxide Thin Films ◽

Direct Current Magnetron Sputtering ◽

Aluminum Doped Zinc Oxide

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Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

Applied Physics Express ◽

10.7567/apex.7.031401 ◽

2014 ◽

Vol 7 (3) ◽

pp. 031401 ◽

Cited By ~ 6

Author(s):

DooHyun Kim ◽

JinNyoung Jang ◽

SooBok Yoon ◽

MunPyo Hong

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Indium Gallium Zinc Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Oxygen Ions ◽

Indium Gallium

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Aluminum-Doped Zinc Oxide Thin Films Prepared by Sol-Gel and RF Magnetron Sputtering

Acta Physica Polonica A ◽

10.12693/aphyspola.120.149 ◽

2011 ◽

Vol 120 (1) ◽

pp. 149-152 ◽

Cited By ~ 6

Author(s):

G.M. Wu ◽

Y.F. Chen ◽

H.C. Lu

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Sol Gel ◽

Rf Magnetron Sputtering ◽

Oxide Thin Films ◽

Aluminum Doped Zinc Oxide

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