Effect of oxidation behavior on visible–infrared property of TiN films

Titanium nitride (TiN) films have historically been used as diffusion barrier between silicon and aluminum, as an adhesion layer for tungsten deposition and as an interconnect material etc. Recently, the role of TiN films as contact barriers in very large scale silicon integrated circuits (VLSI) has been extensively studied. TiN films have resistivities on the order of 20μ Ω-cm which is much lower than that of titanium (nearly 66μ Ω-cm). Deposited TiN films show resistivities which vary from 20 to 100μ Ω-cm depending upon the type of deposition and process conditions. TiNx is known to have a NaCl type crystal structure for a wide range of compositions. Change in color from metallic luster to gold reflects the stabilization of the TiNx (FCC) phase over the close packed Ti(N) hexagonal phase. It was found that TiN (1:1) ideal composition with the FCC (NaCl-type) structure gives the best electrical property.

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Characterization of Microstructure, Hardness and Oxidation Behavior of Carbon Steels Hot Dipped in Al and Al–1 at% Si Molten Baths

Korean Journal of Metals and Materials ◽

10.3365/kjmm.2012.50.8.575 ◽

2012 ◽

Vol 50 (8) ◽

pp. 575-582 ◽

Cited By ~ 3

Author(s):

Dong Bok Lee ◽

Trinh Wan Trung ◽

Sun Kyu Kim ◽

Min Jung Kim ◽

Seul Ki Kim ◽

...

Keyword(s):

Oxidation Behavior ◽

Carbon Steels

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Effect of Surface Treatments of Stainless Steels on Oxidation Behavior Under Operating Condition of IT SOFC Interconnect

Korean Journal of Metals and Materials ◽

10.3365/kjmm.2011.49.1.025 ◽

2011 ◽

Vol 49 (01) ◽

pp. 25-31 ◽

Cited By ~ 1

Author(s):

Min-Seok Moon ◽

Kee-Do Woo ◽

Sang-Hyuk Kim ◽

Myung-Han Yoo

Keyword(s):

Stainless Steels ◽

Oxidation Behavior ◽

Surface Treatments ◽

Operating Condition ◽

Effect Of Surface

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Preparation of TiN Films by Magnetron Sputtering and Diagnostics for Optical Emission of Magnetron Plasma.

Shinku ◽

10.3131/jvsj.38.339 ◽

1995 ◽

Vol 38 (3) ◽

pp. 339-342 ◽

Cited By ~ 2

Author(s):

Yasuki AIHARA ◽

Yuko HIROHATA ◽

Tomoaki HINO ◽

Toshiro YAMASHINA

Keyword(s):

Magnetron Sputtering ◽

Optical Emission ◽

Tin Films

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Oxidation behavior of 26Cr-16Ni and AISI 309 austenitic stainless steels in air flow at 1,173 K

Materials Testing ◽

10.3139/120.110753 ◽

2015 ◽

Vol 57 (7-8) ◽

pp. 597-601 ◽

Cited By ~ 1

Author(s):

Peeraya Pipatnukun ◽

Panyawat Wangyao ◽

Gobboon Lothongkum

Keyword(s):

Stainless Steels ◽

Oxidation Behavior ◽

Air Flow ◽

Austenitic Stainless Steels

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RA602CA

Alloy Digest ◽

10.31399/asm.ad.ni0586 ◽

2002 ◽

Vol 51 (7) ◽

Keyword(s):

Cyclic Oxidation ◽

Oxidation Behavior ◽

Rupture Strength ◽

Heat Treating ◽

Creep Rupture Strength ◽

High Carbon ◽

High Chromium ◽

Alloying Additions ◽

Temperature Performance ◽

Titanium Zirconium

Abstract RA602CA has a high creep rupture strength with alloying additions of titanium, zirconium, and high carbon. High chromium combined with aluminum and yttrium give the alloy a tight oxide scale and good cyclic oxidation behavior. This datasheet provides information on composition, physical properties, elasticity, and tensile properties as well as creep. It also includes information on high temperature performance and corrosion resistance as well as forming, heat treating, and joining. Filing Code: Ni-586. Producer or source: Rolled Alloys Inc.

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