TiOx Films Deposited by Plasma Enhanced Chemical Vapour Deposition Method in Atmospheric Dielectric Barrier Discharge Plasma
2012 ◽
Vol 32
(6)
◽
pp. 1215-1225
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2015 ◽
Vol 43
(3)
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pp. 737-744
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2015 ◽
Vol 15
(3)
◽
pp. 2324-2329
2014 ◽
Vol 53
(11S)
◽
pp. 11RA08
◽
2017 ◽
Vol 37
(6)
◽
pp. 1621-1634
◽
2012 ◽
Vol 40
(4)
◽
pp. 1134-1141
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