Plasma-Chemical Treatment of Process Gases with Low-Concentration Fluorine-Containing Components
2016 ◽
Vol 37
(1)
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pp. 273-286
2007 ◽
Vol 81
(5)
◽
pp. 696-700
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2015 ◽
Vol 9
(4)
◽
pp. 684-693
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2018 ◽
Vol 1124
◽
pp. 081035
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Keyword(s):
2017 ◽
Vol 4
(3(36))
◽
pp. 4-8
2014 ◽
Vol 5
(3(19))
◽
pp. 19
2009 ◽
Vol 83
(10)
◽
pp. 1720-1726
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Keyword(s):