Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method
2018 ◽
Vol 28
(1)
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pp. 343-354
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2010 ◽
Vol 204
(24)
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pp. 3941-3946
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2006 ◽
pp. 323-327
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2017 ◽
Vol 109
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pp. 402-413
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2003 ◽
Vol 254-256
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pp. 463-466
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2012 ◽
Vol 60
(19)
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pp. 6494-6507
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2006 ◽
Vol 201
(7)
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pp. 4209-4214
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2013 ◽
Vol 231
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pp. 247-252
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2005 ◽
Vol 200
(5-6)
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pp. 1702-1708
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Keyword(s):
Cathodic arc deposition of TiN and Zr(C, N) at low substrate temperature using a pulsed bias voltage
1991 ◽
Vol 140
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pp. 830-837
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Keyword(s):