Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method

2018 ◽  
Vol 28 (1) ◽  
pp. 343-354 ◽  
Author(s):  
Nikolay Petkov ◽  
Egor Kashkarov ◽  
Aleksei Obrosov ◽  
Totka Bakalova ◽  
Pavel Kejzlar ◽  
...  
2003 ◽  
Vol 254-256 ◽  
pp. 463-466 ◽  
Author(s):  
B. Kepenek ◽  
U.Ö.Ş. Seker ◽  
A.F. Çakır ◽  
M. Ürgen ◽  
C. Tamerler

2012 ◽  
Vol 60 (19) ◽  
pp. 6494-6507 ◽  
Author(s):  
A. Khatibi ◽  
J. Sjölen ◽  
G. Greczynski ◽  
J. Jensen ◽  
P. Eklund ◽  
...  

2001 ◽  
Vol 697 ◽  
Author(s):  
A.K. Sikder ◽  
I. M. Irfan ◽  
Ashok Kumar ◽  
Robert Durvin ◽  
Mark McDonough ◽  
...  

Mechanical properties of thin films differ significantly from those of bulk materials due to the effects of interfaces, microstructure and thick underlying substrates. In this study we will present the results of nanoindentation tests to evaluate mechanical properties of nitride (TiN, ZrN, CrN, TiCN and TiAlN) thin films. Films were coated on steel substrates using cathodic arc deposition technique. Surface morphology and roughness of the samples are investigated using atomic force microscopy (AFM). Films were also characterized by x-ray diffraction (XRD) technique. Nanoindentation technique along with AFM and XRD methods are very useful for characterizing hard thin coatings.


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