Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices

2008 ◽  
Vol 17 (2) ◽  
pp. 181-198 ◽  
Author(s):  
Jun Akedo
Keyword(s):  
Room Temperature ◽  
Ceramic Powder ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Fine Ceramic ◽  
Aerosol Deposition Method ◽  
Temperature Impact ◽  
Fine Ceramic Powder

Influence of high temperature annealing on the dielectric properties of alumina films prepared by the aerosol deposition method

2018 ◽  
Vol 11 (02) ◽  
pp. 1850022 ◽  
Author(s):  
Nico Leupold ◽  
Michael Schubert ◽  
Jaroslaw Kita ◽  
Ralf Moos
Keyword(s):  
Dielectric Properties ◽  
Loss Tangent ◽  
Room Temperature ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Low Frequencies ◽  
Alumina Films ◽  
Ceramic Films ◽  
Aerosol Deposition Method ◽  
Temperature Impact

The aerosol deposition method (ADM) is a novel coating technique that allows to fabricate dense and nanocrystalline ceramic films at room temperature. To investigate the dielectric properties of aerosol deposited alumina films at high temperatures and the influence of annealing on them, the temperature was increased in steps of 100[Formula: see text]C from 200[Formula: see text]C to 900[Formula: see text]C and subsequently cooled down stepwise again. At each step, the dielectric properties were measured by impedance spectroscopy between 50[Formula: see text]mHz and 200[Formula: see text]kHz. During the heating steps, the relative permittivity and also the loss tangent showed a disordered behavior with various maxima in the loss tangent. After reaching 900[Formula: see text]C, during cooling, the behavior was more ordered, and the loss tangent exhibited only one maximum that appeared at lower frequencies. Overall, the annealing reduces the loss tangent at low frequencies and low temperatures. The origin of this behavior could lie in the annealing of defects, which are incorporated into the layer when the particles hit the surface of the substrate and crack while being deposited via ADM following the room temperature impact consolidation mechanism (RTIC).

Dielectric Properties of Nanograined BaTiO3 Ceramics Fabricated by Aerosol Deposition Method

2011 ◽  
Vol 485 ◽  
pp. 183-186 ◽  
Author(s):  
Tsutomu Furuta ◽  
Saki Hatta ◽  
Yoichi Kigoshi ◽  
Takuya Hoshina ◽  
Hiroaki Takeda ◽  
...  
Keyword(s):  
Grain Size ◽  
Room Temperature ◽  
Annealing Treatment ◽  
Aerosol Deposition ◽  
Dielectric Measurement ◽  
Deposition Method ◽  
Grain Sizes ◽  
Average Grain Size ◽  
Aerosol Deposition Method ◽  
Polarization Electric Field

Freestanding BaTiO3 ceramics films were fabricated using the aerosol deposition (AD) method and the size effect of nanograined BaTiO3 ceramics was demonstrated. Dense BaTiO3 thick film fabricated by the AD method was crystallized and detached from substrate by an annealing treatment at 600 °C, and then the grain size was controlled by a reannealing treatment at various temperatures. As a result, freestanding BaTiO3 thick films with various grain sizes from 24 to 170 nm were successfully obtained. Polarization–electric field (P–E) measurement revealed that BaTiO3 ceramics with grain sizes of more than 58 nm showed ferroelectricity, whereas BaTiO3 ceramics with an average grain size of 24 nm showed paraelectricity at room temperature. Dielectric measurement indicated that the permittivity decreased with decreasing grain size in the range of 170 to 24 nm.

Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer

2004 ◽  
Vol 449-452 ◽  
pp. 43-48 ◽  
Author(s):  
Jun Akedo
Keyword(s):  
Gas Flow ◽  
Room Temperature ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Polycrystalline Structure ◽  
Mechanical And Electrical Properties ◽  
Aerosol Deposition Method ◽  
Shock Consolidation ◽  
Nano Crystal ◽  
Fine Ceramics

Aerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 ~ 100 µm), dense, uniform and hard ceramics layers. Depositions were fulfilled at room temperature. Every layer has polycrystalline structure with nano-meter order scale.􀀂 The results of fabrications, microstructure, mechanical and electrical properties of oxides (α-Al2O3; Pb(Zr0.52,Ti0.48)O3 etc.) and non-oxides materials are presented.

How to Make Ceramic Gas Sensor Films at Room Temperature - the Powder Aerosol Deposition Method

2021 ◽  
Vol MA2021-01 (56) ◽  
pp. 1521-1521
Author(s):  
Ralf Moos ◽  
Murat Bektas ◽  
Gunter Hagen ◽  
Jaroslaw Kita ◽  
Daniela Schoenauer-Kamin ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Room Temperature ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Aerosol Deposition Method ◽  
Powder Aerosol ◽  
Ceramic Gas Sensor
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