Flexible Evanescent Wave Interference Lithography System for Sub-half-Wavelength Complex Relief Structures Fabrication

2021 ◽  
Author(s):  
Yuki Torii ◽  
Shuzo Masui ◽  
Yuki Matsumoto ◽  
Kunikazu Suzuki ◽  
Masaki Michihata ◽  
...  
Keyword(s):  
Evanescent Wave ◽  
Interference Lithography ◽  
Wave Interference ◽  
Half Wavelength ◽  
Lithography System

scholarly journals Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats

2019 ◽  
Vol 27 (22) ◽  
pp. 31522
Author(s):  
Shuzo Masui ◽  
Yuki Torii ◽  
Masaki Michihata ◽  
Kiyoshi Takamasu ◽  
Satoru Takahashi
Keyword(s):  
Evanescent Wave ◽  
Periodic Structures ◽  
Interference Lithography ◽  
Wave Interference

Approach of enhancing exposure depth for evanescent wave interference lithography

2010 ◽  
Vol 87 (5-8) ◽  
pp. 1168-1171 ◽  
Author(s):  
Xiaoyun Niu ◽  
Yuming Qi ◽  
Jingquan Wang ◽  
Zhiyou Zhang ◽  
Jinglei Du ◽  
...  
Keyword(s):  
Evanescent Wave ◽  
Interference Lithography ◽  
Wave Interference

Evanescent wave interference lithography for surface nano-structuring

2007 ◽  
Vol T129 ◽  
pp. 35-37 ◽  
Author(s):  
Y Zhou ◽  
M H Hong ◽  
J Y H Fuh ◽  
L Lu ◽  
B S Lukiyanchuk
Keyword(s):  
Evanescent Wave ◽  
Interference Lithography ◽  
Wave Interference

A virtual optical probe based on evanescent wave interference

2002 ◽  
Vol 11 (10) ◽  
pp. 1022-1027 ◽  
Author(s):  
Sun Li-Qun ◽  
Wang Jia ◽  
Hong Tao ◽  
Tian Qian
Keyword(s):  
Evanescent Wave ◽  
Optical Probe ◽  
Wave Interference

Numerical Analysis of SPP Maskless Interference Lithography System

2012 ◽  
Vol 41 (5) ◽  
pp. 558-564
Author(s):  
董启明 DONG Qiming ◽  
郭小伟 GUO Xiaowei
Keyword(s):  
Numerical Analysis ◽  
Interference Lithography ◽  
Lithography System
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