Crystallographic structure and ferroelectricity of epitaxial hafnium oxide thin films

2021 ◽  
Author(s):  
Shin Kyu Lee ◽  
Chung Wung Bark
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Crystallographic Structure ◽  
Oxide Thin Films

scholarly journals Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films

APL Materials ◽  
2021 ◽  
Vol 9 (5) ◽  
pp. 051120
Author(s):  
Clemens Mart ◽  
Thomas Kämpfe ◽  
Kati Kühnel ◽  
Malte Czernohorsky ◽  
Sabine Kolodinski ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Transitions ◽  
Hafnium Oxide ◽  
Oxide Thin Films ◽  
Pyroelectric Response

scholarly journals Hafnium carbide formation in oxygen deficient hafnium oxide thin films

2016 ◽  
Vol 108 (25) ◽  
pp. 252903 ◽  
Author(s):  
C. Rodenbücher ◽  
E. Hildebrandt ◽  
K. Szot ◽  
S. U. Sharath ◽  
J. Kurian ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Carbide Formation ◽  
Hafnium Carbide ◽  
Oxide Thin Films

scholarly journals Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition

2005 ◽  
Vol 15 (4) ◽  
pp. 275-280
Author(s):  
Hie-Chul Kim ◽  
Min-Wan Kim ◽  
Hyung-Su Kim ◽  
Hyug-Jong Kim ◽  
Woo-Keun Sohn ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Physical characterization of hafnium oxide thin films and their application as gas sensing devices

1998 ◽  
Vol 16 (6) ◽  
pp. 3564-3568 ◽  
Author(s):  
S. Capone ◽  
G. Leo ◽  
R. Rella ◽  
P. Siciliano ◽  
L. Vasanelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Gas Sensing ◽  
Physical Characterization ◽  
Oxide Thin Films

Analysis and Study of Characteristic FTIR Absorption Peaks in Hafnium Oxide Thin Films Deposited at Low-Temperature

2019 ◽  
Vol 21 (1) ◽  
pp. 68-73
Author(s):  
Rafael A. Salinas Domínguez ◽  
Abdu Orduña-Díaz ◽  
Sonia Cerón ◽  
Miguel A. Dominguez
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Hafnium Oxide ◽  
Oxide Thin Films ◽  
Analysis And Study

Preparation of hafnium oxide thin films by sol–gel method

2007 ◽  
Vol 21 (1-4) ◽  
pp. 499-502 ◽  
Author(s):  
Z. J. Wang ◽  
T. Kumagai ◽  
H. Kokawa ◽  
M. Ichiki ◽  
R. Maeda
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method

Structural and electrical characterization of amorphous lanthanum hafnium oxide thin films

2006 ◽  
Vol 99 (10) ◽  
pp. 103704 ◽  
Author(s):  
Yim Fun Loo ◽  
Stephen Taylor ◽  
Robert T. Murray ◽  
Anthony C. Jones ◽  
Paul R. Chalker
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Oxide Thin Films
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