Measurement of particle nucleation and growth in low pressure chemical vapor deposition systems with the particle beam mass spectrometer

1995 ◽  
Vol 26 ◽  
pp. S633-S634
Author(s):  
P.J Ziemann ◽  
P Liu ◽  
S Nijhawan ◽  
D.B Kittelson ◽  
P.H McMurry ◽  
...  
Author(s):  
Meric Firat ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Maria Recaman Payo ◽  
Filip Duerinckx ◽  
Rajiv Sharma ◽  
...  

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  

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