Novel in situ optical monitoring method for selective area metalorganic vapor phase epitaxy

1996 ◽  
Vol 167 (3-4) ◽  
pp. 434-439 ◽  
Author(s):  
Yasuhiko Ishikawa ◽  
Kazuaki Nakakoshi ◽  
Takashi Fukui
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Optical Monitoring ◽  
Monitoring Method ◽  
Selective Area

In situ optical monitoring of metalorganic vapor phase epitaxy growth of C-doped GaAs

1999 ◽  
Vol 68 (3) ◽  
pp. 349-352 ◽  
Author(s):  
A. Rebey ◽  
B. El Jani ◽  
A. Leycuras ◽  
S. Laugt ◽  
P. Gibart
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Optical Monitoring

Fabrication of quantum wire structures by in-situ gas etching and selective-area metalorganic vapor phase epitaxy regrowth

1994 ◽  
Vol 145 (1-4) ◽  
pp. 734-739 ◽  
Author(s):  
K. Shimoyama ◽  
S. Nagao ◽  
Y. Inoue ◽  
K. Kiyomi ◽  
N. Hosoi ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Quantum Wire ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Selective Area
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