Liquid nitrogen cooled window for high frequency plasma heating

1994 ◽  
Vol 212-215 ◽  
pp. 1035-1038 ◽  
Author(s):  
H.E. Häfner ◽  
E. Bojarsky ◽  
K. Heckert ◽  
P. Norajitra ◽  
H. Reiser
Keyword(s):  
Liquid Nitrogen ◽  
High Frequency ◽  
Plasma Heating ◽  
High Frequency Plasma ◽  
Frequency Plasma

High-Frequency Plasma Heating

1995 ◽  
Vol 28 (4) ◽  
pp. 1767-1768
Author(s):  
R. L. Freeman
Keyword(s):  
High Frequency ◽  
Plasma Heating ◽  
High Frequency Plasma ◽  
Frequency Plasma

CRYOCOOLED WINDOWS FOR HIGH FREQUENCY PLASMA HEATING

1993 ◽  
pp. 520-523 ◽  
Author(s):  
H.E. Häfner ◽  
E. Bojarsky ◽  
P. Norajitra ◽  
H. Reiser
Keyword(s):  
High Frequency ◽  
Plasma Heating ◽  
High Frequency Plasma ◽  
Frequency Plasma

The Development of Polyethylene Naphthalate Films by Low-pressure High-frequency Plasma Chemical Vapor Deposition System with Advance Oxidations Process

2015 ◽  
Vol 18 (1) ◽  
Author(s):  
Nuttee Thungsuk ◽  
Toshifumi Yuji ◽  
Narong Mungkung ◽  
Yoshimi Okamura ◽  
Atsushi Fujimaru ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Frequency ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Polyethylene Naphthalate ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
High Frequency Plasma ◽  
Frequency Plasma

AbstractThe low-pressure high-frequency plasma chemical vapor deposition (CVD) system was developed with non-thermal plasma process to study the Polyethylene naphthalate (PEN) surface characteristics. Plasma surface treatment by oxygen can improve the adhesive properties. A mixture of Ar and O

Sign in / Sign up

Export Citation Format

Share Document