Core and valence electron excitations of amorphous silicon oxide and silicon nitride studied by low energy electron loss spectroscopy

1979 ◽  
Vol 61 (2) ◽  
pp. 217-228 ◽  
Author(s):  
N. Lieske ◽  
R. Hezel
Keyword(s):  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Valence Electron ◽  
Silicon Oxide ◽  
Low Energy ◽  
Energy Electron ◽  
Electron Loss ◽  
Low Energy Electron ◽  
Amorphous Silicon Oxide ◽  
Electron Excitations

Mechanism of low temperature nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact

1999 ◽  
Vol 85 (5) ◽  
pp. 2921-2928 ◽  
Author(s):  
Toshiko Mizokuro ◽  
Kenji Yoneda ◽  
Yoshihiro Todokoro ◽  
Hikaru Kobayashi
Keyword(s):  
Low Temperature ◽  
Electron Impact ◽  
Silicon Oxide ◽  
Nitrogen Plasma ◽  
Low Energy ◽  
Energy Electron ◽  
Oxide Layers ◽  
Low Energy Electron

Low-energy electron-loss spectroscopy of GaSe and InSe

1986 ◽  
Vol 33 (12) ◽  
pp. 8164-8170 ◽  
Author(s):  
H. Araki ◽  
S. Nishikawa ◽  
T. Tanbo ◽  
C. Tatsuyama
Keyword(s):  
Low Energy ◽  
Energy Electron ◽  
Electron Loss ◽  
Low Energy Electron

Oxidation of metallic cadmium studied by low-energy-electron-loss spectroscopy

1981 ◽  
Vol 24 (2) ◽  
pp. 574-581 ◽  
Author(s):  
Atsuko Ebina ◽  
Kiyomitsu Asano ◽  
Tadashi Takahashi
Keyword(s):  
Low Energy ◽  
Energy Electron ◽  
Electron Loss ◽  
Metallic Cadmium ◽  
Low Energy Electron

Low-energy electron-loss spectroscopy of a ZnSe(111) surface

1977 ◽  
Vol 16 (6) ◽  
pp. 2676-2683 ◽  
Author(s):  
Atsuko Ebina ◽  
Tadashi Takahashi
Keyword(s):  
Low Energy ◽  
Energy Electron ◽  
Electron Loss ◽  
Low Energy Electron

Scanning low energy electron loss microscopy (SLEELM)

1987 ◽  
Vol 147 (2) ◽  
pp. 137-147 ◽  
Author(s):  
M. M. El Gomati ◽  
J. A. D. Matthew
Keyword(s):  
Low Energy ◽  
Energy Electron ◽  
Electron Loss ◽  
Low Energy Electron
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