Mechanism of low temperature nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact

1999 ◽  
Vol 85 (5) ◽  
pp. 2921-2928 ◽  
Author(s):  
Toshiko Mizokuro ◽  
Kenji Yoneda ◽  
Yoshihiro Todokoro ◽  
Hikaru Kobayashi
Keyword(s):  
Low Temperature ◽  
Electron Impact ◽  
Silicon Oxide ◽  
Nitrogen Plasma ◽  
Low Energy ◽  
Energy Electron ◽  
Oxide Layers ◽  
Low Energy Electron

Nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact

1997 ◽  
Vol 71 (14) ◽  
pp. 1978-1980 ◽  
Author(s):  
H. Kobayashi ◽  
T. Mizokuro ◽  
Y. Nakato ◽  
K. Yoneda ◽  
Y. Todokoro
Keyword(s):  
Electron Impact ◽  
Silicon Oxide ◽  
Nitrogen Plasma ◽  
Low Energy ◽  
Energy Electron ◽  
Oxide Layers ◽  
Low Energy Electron

scholarly journals Low-energy electron impact dissociative recombination and vibrational transitions of N2+

2021 ◽  
Vol 129 (5) ◽  
pp. 053303
Author(s):  
A. Abdoulanziz ◽  
C. Argentin ◽  
V. Laporta ◽  
K. Chakrabarti ◽  
A. Bultel ◽  
...  
Keyword(s):  
Electron Impact ◽  
Dissociative Recombination ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron ◽  
Vibrational Transitions

scholarly journals Low-energy electron-impact ionization of helium

1998 ◽  
Vol 57 (5) ◽  
pp. R3161-R3164 ◽  
Author(s):  
Igor Bray ◽  
Dmitry V. Fursa ◽  
J. Röder ◽  
H. Ehrhardt
Keyword(s):  
Electron Impact ◽  
Impact Ionization ◽  
Electron Impact Ionization ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron

Low energy electron impact attachment and ionization in HgBr2

1982 ◽  
Vol 40 (3) ◽  
pp. 225-227 ◽  
Author(s):  
W. J. Wiegand ◽  
L. R. Boedeker
Keyword(s):  
Electron Impact ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron
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