The effect of substrate temperature on the composition and growth of tantalum oxide thin films deposited by plasma-enhanced chemical vapour deposition

1991 ◽  
Vol 206 (1-2) ◽  
pp. 102-106 ◽  
Author(s):  
Sun-Oo Kim ◽  
Jeong Soo Byun ◽  
Hyeong Joon Kim
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Tantalum Oxide ◽  
Chemical Vapour ◽  
Oxide Thin Films

Titanium oxide thin films obtained with physical and chemical vapour deposition methods for optical biosensing purposes

2017 ◽  
Vol 93 ◽  
pp. 102-109 ◽  
Author(s):  
M. Dominik ◽  
A. Leśniewski ◽  
M. Janczuk ◽  
J. Niedziółka-Jönsson ◽  
M. Hołdyński ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Oxide Thin Films ◽  
Optical Biosensing ◽  
Physical And Chemical

Evaluation of niobium dimethylamino-ethoxide for chemical vapour deposition of niobium oxide thin films

2014 ◽  
Vol 571 ◽  
pp. 94-101 ◽  
Author(s):  
Ali Dabirian ◽  
Yury Kuzminykh ◽  
Estelle Wagner ◽  
Giacomo Benvenuti ◽  
Simon Rushworth ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Niobium Oxide ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Oxide Thin Films
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