Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor.

1995 ◽  
Vol 270 (1-2) ◽  
pp. 49-54 ◽  
Author(s):  
J.C. Rostaing ◽  
F. Coeuret ◽  
J. Pelletier ◽  
T. Lagarde ◽  
R. Etemadi
Keyword(s):  
Cyclotron Resonance ◽  
Room Temperature ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Silica Coatings ◽  
Resonance Plasma

Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor

1990 ◽  
Vol 57 (12) ◽  
pp. 1188-1190 ◽  
Author(s):  
Dennis J. Trevor ◽  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Jacques Derouard ◽  
Richard A. Gottscho ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Spatially Resolved ◽  
Field Electron ◽  
Ion Velocity ◽  
Resonance Plasma
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