Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor

Plasma Reactor ◽

Electron Cyclotron ◽

Spatially Resolved ◽

Field Electron ◽

Ion Velocity ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Operational characteristics of SF6 etching in an electron cyclotron resonance plasma reactor

10.1116/1.585612 ◽

1991 ◽

Vol 9 (2) ◽

pp. 318 ◽

Cited By ~ 29

Author(s):

J. L. Cecchi

Keyword(s):

Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Operational Characteristics ◽

Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor.

Thin Solid Films ◽

10.1016/0040-6090(96)80068-x ◽

1995 ◽

Vol 270 (1-2) ◽

pp. 49-54 ◽

Cited By ~ 12

Author(s):

J.C. Rostaing ◽

F. Coeuret ◽

J. Pelletier ◽

T. Lagarde ◽

R. Etemadi

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Silica Coatings ◽

Electron cyclotron resonance plasma reactor for cryogenic etching

Review of Scientific Instruments ◽

10.1063/1.1144284 ◽

1993 ◽

Vol 64 (12) ◽

pp. 3572-3584 ◽

Cited By ~ 17

Author(s):

Eray S. Aydil ◽

Jeffrey A. Gregus ◽

Richard A. Gottscho

Keyword(s):

Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Modeling of plasma density, argon ion energy and ion velocity functions in a dipolar electron cyclotron resonance plasma source

Vacuum ◽

10.1016/j.vacuum.2020.109215 ◽

2020 ◽

Vol 174 ◽

pp. 109215

Author(s):

Bin Zhang ◽

Xiaobing Zhang

Keyword(s):

Plasma Density ◽

Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Ion Energy ◽

Ion Velocity ◽

Argon Ion ◽

Influence of microwave driver coupling design on plasma density at Testbench for Ion sources Plasma Studies, a 2.45 GHz Electron Cyclotron Resonance Plasma Reactor

Review of Scientific Instruments ◽

10.1063/1.4869343 ◽

2014 ◽

Vol 85 (3) ◽

pp. 033310 ◽

Cited By ~ 12

Author(s):

A. Megía-Macías ◽

O. D. Cortázar ◽

A. Vizcaíno-de-Julián

Keyword(s):

Plasma Density ◽

Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Ion Sources ◽

Metastable chlorine ion transport in a diverging field electron cyclotron resonance plasma

Journal of Applied Physics ◽

10.1063/1.351460 ◽

1992 ◽

Vol 72 (8) ◽

pp. 3384-3393 ◽

Cited By ~ 46

Author(s):

Toshiki Nakano ◽

Nader Sadeghi ◽

Dennis J. Trevor ◽

Richard A. Gottscho ◽

R. W. Boswell

Keyword(s):

Ion Transport ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Field Electron ◽

Chlorine Ion ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Anisotropic etching of submicron silicon features in a 23 cm diameter microwave multicusp electron-cyclotron-resonance plasma reactor

10.1116/1.585836 ◽

1991 ◽

Vol 9 (6) ◽

pp. 3521 ◽

Cited By ~ 8

Author(s):

B. D. Musson

Keyword(s):

Cyclotron Resonance ◽

Plasma Reactor ◽

Anisotropic Etching ◽

Electron Cyclotron ◽

The effects of substrate bias on plasma parameters in an electron cyclotron resonance plasma reactor

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577181 ◽

1991 ◽

Vol 9 (6) ◽

pp. 3113-3118 ◽

Cited By ~ 12

Author(s):

John B. O. Caughman ◽

William M. Holber

Keyword(s):

Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Substrate Bias ◽

Plasma Parameters ◽

Wave propagation and damping in an electron cyclotron resonance plasma reactor

Applied Physics Letters ◽

10.1063/1.106080 ◽

1991 ◽

Vol 59 (18) ◽

pp. 2234-2236 ◽

Cited By ~ 4

Author(s):

Shoji Miyake ◽

Wei Chen ◽

Yoshinobu Kawai

Keyword(s):

Wave Propagation ◽

Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Electron cyclotron resonance plasma reactor for production of carbon stripper foil

Japanese Journal of Applied Physics ◽

10.7567/jjap.57.01aa04 ◽

2017 ◽

Vol 57 (1S) ◽

pp. 01AA04

Author(s):

Camille Faith Romero ◽

Keita Kanamori ◽

Michikazu Kinsho ◽

Masahiro Yoshimoto ◽

Motoi Wada

Keyword(s):

Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Stripper Foil ◽